Diffusion Morning Report 08/01/05

Ted Berg tberg at snf.stanford.edu
Mon Aug 1 06:41:00 PDT 2005


Good Morning All,
    Looking  good this morning.  LTO is up to 33 microns and will be 
cleaned tomorrow.  Only 2 weeks left until bank 4 leaves and the
furnaces with the exception of bank one will all be down for up to two 
weeks.  Prep work is underway everything else is OK for now.


  	Date: 	8/1/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	4.67/30
Tylan 9-Poly 	Up 	  	4.16/30
Tylan 10-Nitride 	Up 	  	9.85/30
Tylan 11-BPSG-LTO 	Up 	  	333.82/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.28/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 590 PSI 	 changeover working well 

.
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