Diffusion Morning Report 08/04/05

Ted Berg tberg at snf.stanford.edu
Thu Aug 4 07:01:45 PDT 2005

Good Morning All,
    Looking good this morning . Had to add some He to the compressor for 
ebeam. LTO is back up after pull and clean. No other problem
at this time.  Eleven days until bank 4 leaves and furnaces are shut down. 

  	Date: 	8/4/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	4.67/30
Tylan 9-Poly 	Up 	  	8.45/30
Tylan 10-Nitride 	Up 	  	5.62/30
Tylan 11-BPSG-LTO 	Up 	Coat and test complete 	.65/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.28/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	A on line 580 PSI 	 changeover working well 

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