Diffusion Morning Report 08/10/05

Ted Berg tberg at snf.stanford.edu
Wed Aug 10 06:22:52 PDT 2005


Good Morning All,
       Looking good this morning. Tystar is down for computer 
problems-looking into it. Burn box pressure is high -cleaning this
morning.  Next Monday is shutdown for furnaces .  Everything else looks 
OK for  now.

  	Date: 	8/10/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	4.67/30
Tylan 9-Poly 	Up 	  	11.64/30
Tylan 10-Nitride 	Up 	  	8.15/30
Tylan 11-BPSG-LTO 	Up 	  	2.91/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	18.28/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 560 PSI 	 changeover working well 




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