Diffusion Morning Report 08/12/05

Ted Berg tberg at snf.stanford.edu
Fri Aug 12 06:21:05 PDT 2005

Good Morning All,
    Looking OK this morning. Epi parts should be here today. Ebeam is 
down for cryo regen. Burn box cleaned this morning.  Monday furnaces
go down for new bank install, lots of storage going away. Everything 
else looks OK for now.

  	Date: 	8/12/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	4.67/30
Tylan 9-Poly 	Up 	  	13.94/30
Tylan 10-Nitride 	Up 	  	8.67/30
Tylan 11-BPSG-LTO 	Up 	  	4.53/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	18.28/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	Cleaned this morning 	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	A on line 540 PSI 	 changeover working well 

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