Diffusion Morning Report 08/17/05

Ted Berg tberg at snf.stanford.edu
Wed Aug 17 06:28:10 PDT 2005


Good Morning All,
    Looking OK this morning.  Furnace project is moving along OK -gas 
box is mounted and gas lines being run.  Ebeam is down for a cassette issue
looking into it.  Everything else looks OK for now.


  	Date: 	8/17/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	Bank 4 move 	 
Tylan 6-POCl3 	Down 	Bank 4 move 	 
Tylan 7-TEOS2 	Down 	Bank 4 move 	 
Tylan 8-SiGe 	Down 	Bank 4 move 	4.67/30
Tylan 9-Poly 	Down 	Bank 4 move 	18.94/30
Tylan 10-Nitride 	Down 	Bank 4 move 	10.29/30
Tylan 11-BPSG-LTO 	Down 	Bank 4 move 	5.41/30
Tylan 12-FGA 	Down 	Bank 4 move 	 
Tystar 	GONE 	Bank 4 move 	 
Doped Poly 	GONE 	Bank 4 move 	 
TEOS 	GONE 	Bank 4 move 	 
Tylan 16 	N/A 	  	 
Thermco 1 	Down 	Bank 4 move 	 
Thermco 2 	Down 	Bank 4 move 	 
Thermco Poly 	Down 	Bank 4 move 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 540 PSI 	 changeover working well 


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