Diffusion Morning Report 08/18/05

Ted Berg tberg at snf.stanford.edu
Thu Aug 18 06:22:34 PDT 2005


Good Morning All,
    Furnace move is coming right along-Gaslines are moved to 
distribution box and under pressure test, House gases are turned 90
degrees to allow new furnace access, old furnace isdisconnected and will 
be moving out soon.  If the county cooperates we should be in good
shape. Tylan 1 has O2 flow alarms-checking it out.  Everything else 
looks  OK for now.

Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	Bank 4 move 	 
Tylan 6-POCl3 	Down 	Bank 4 move 	 
Tylan 7-TEOS2 	Down 	Bank 4 move 	 
Tylan 8-SiGe 	Down 	Bank 4 move 	4.67/30
Tylan 9-Poly 	Down 	Bank 4 move 	18.94/30
Tylan 10-Nitride 	Down 	Bank 4 move 	10.29/30
Tylan 11-BPSG-LTO 	Down 	Bank 4 move 	5.41/30
Tylan 12-FGA 	Down 	Bank 4 move 	 
Tystar 	GONE 	Bank 4 move 	 
Doped Poly 	GONE 	Bank 4 move 	 
TEOS 	GONE 	Bank 4 move 	 
Tylan 16 	N/A 	  	 
Thermco 1 	Down 	Bank 4 move 	 
Thermco 2 	Down 	Bank 4 move 	 
Thermco Poly 	Down 	Bank 4 move 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 540 PSI 	 changeover working well 

 
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