Diffusion Morning Report 08/19/05

Ted Berg tberg at snf.stanford.edu
Fri Aug 19 06:19:48 PDT 2005


Good Morning All,
    Looking good this morning. The Tylan bank 4 furnace is now 
completely removed. The new gas box is installed and leak checked and 
has had
its first inspection. A few more inspections and we will be ready to 
turn gases back on. Wall demo and Thermco move in will begin next week.
Everything else looks OK for now.

  	Date: 	8/19/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	Bank 4 move 	 
Tylan 6-POCl3 	Down 	Bank 4 move 	 
Tylan 7-TEOS2 	Down 	Bank 4 move 	 
Tylan 8-SiGe 	Down 	Bank 4 move 	4.67/30
Tylan 9-Poly 	Down 	Bank 4 move 	18.94/30
Tylan 10-Nitride 	Down 	Bank 4 move 	10.29/30
Tylan 11-BPSG-LTO 	Down 	Bank 4 move 	5.41/30
Tylan 12-FGA 	Down 	Bank 4 move 	 
Tystar 	GONE 	Bank 4 move 	 
Doped Poly 	GONE 	Bank 4 move 	 
TEOS 	GONE 	Bank 4 move 	 
Tylan 16 	N/A 	  	 
Thermco 1 	Down 	Bank 4 move 	 
Thermco 2 	Down 	Bank 4 move 	 
Thermco Poly 	Down 	Bank 4 move 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 540 PSI 	 changeover working well 
  	  	  	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20050819/c4978b66/attachment.html>


More information about the diffusion mailing list