Diffusion Morning Report 08/25/05

Ted Berg tberg at snf.stanford.edu
Thu Aug 25 06:34:47 PDT 2005


Good  Morning All,
    Looking good this morning. We passed the first phase of the 
inspection and gases are now back on to the furnaces . Tubes are beginning
to come back up. LPs arer testing, Thermco 1 and 2 are back up.  Had a 
problem with SiH4 flow to LTO last night -checking it out. 
Everything else looks OK for now.

  	Date: 	8/25/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	Bank 4 move 	 
Tylan 6-POCl3 	Down 	Bank 4 move 	 
Tylan 7-TEOS2 	Down 	Bank 4 move 	 
Tylan 8-SiGe 	Down 	Bank 4 move 	4.67/30
Tylan 9-Poly 	Down 	Bank 4 move 	18.94/30
Tylan 10-Nitride 	Down 	Bank 4 move 	10.29/30
Tylan 11-BPSG-LTO 	Down 	Bank 4 move 	5.41/30
Tylan 12-FGA 	Up 	  	 

	
	
	 

	
	
	 

	
	
	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Down 	Bank 4 move 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 520 PSI 	 changeover working well 


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