Diffusion Morning Report 08/29/05

Ted Berg tberg at snf.stanford.edu
Mon Aug 29 06:56:36 PDT 2005


Good Morning All,
    Looking OK this morning. Tylan poly has low dep rate, Tylan nitride 
is having intermittant problems in pump program-investigating.
Holes were drilled for new furnace install on Friday-it is moving 
along.  Epi has some issues.  Tylan 1 had a MFS alarm-zeroed N2 channel.
Everything else looks OK for now.

  	Date: 	8/29/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	Adjusted N2 Zero 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Down 	Bank 4 move 	4.67/30
Tylan 9-Poly 	yellow 	Low dep rate 	19.05/30
Tylan 10-Nitride 	yellow 	intermittant pump program 	10.41/30
Tylan 11-BPSG-LTO 	Up 	  	5.6/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
  	  	  	 
  	  	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	B on line 700 	 changeover working well 


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