Diffusion Morning Report 08/31/05

Ted Berg tberg at snf.stanford.edu
Wed Aug 31 06:32:19 PDT 2005

Good Morning All,
    Looking good this morning. Epi is down for tube change and 1% 
phosphine change.  SiGe needs a test after shutdown.  Everything else looks
good for now.

  	Date: 	8/31/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Down 	needs test 	4.67/30
Tylan 9-Poly 	Up 	  	20.99/30
Tylan 10-Nitride 	Up 	  	11.85/30
Tylan 11-BPSG-LTO 	Up 	  	8.65/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 700 	 changeover working well 

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