From seymour at snf.stanford.edu Thu Dec 1 07:38:53 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Thu, 1 Dec 2005 07:38:53 -0800 Subject: Diffusion Morning Report 12/1/2005 Message-ID: <007001c5f68d$55fd9170$9a6540ab@bigvtwin> Good Morning All, Ted is out for the next week. There is a problem with Tylanpoly that we are addressing this morning. It will require a pull and clean. All else is looking good Date: 12/1/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 12.04/30 Tylan 9-Poly Up Brown coating on tube 3.54/30 Tylan 10-Nitride Up 11.04/30 Tylan 11-BPSG-LTO Up 30.32/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 300 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at snf.stanford.edu Thu Dec 1 18:20:23 2005 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Thu, 01 Dec 2005 18:20:23 -0800 Subject: Poly test In-Reply-To: <438DBCED.1000007@snf.stanford.edu> References: <438DBCED.1000007@snf.stanford.edu> Message-ID: <438FAF67.8090309@snf.stanford.edu> After the tube was pulled Ray checked the pump down, the flows and the temp. I ran a polyemit test for 15 minutes and expected ~2000Ang. The wafers are brownish color on the edges and the back. The thickness was ~300 Ang. From the tycom the temp, flows and pressure looked normal. The wafers are in a box next to the tycom. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From seymour at snf.stanford.edu Fri Dec 2 09:53:33 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Fri, 2 Dec 2005 09:53:33 -0800 Subject: Diffusion Morning Report Message-ID: <00c701c5f769$4fe8c9d0$9a6540ab@bigvtwin> Morning All, The Tylanpoly is still down for brown deposits in the tube. All else is looking good so far. Ed and Mike are out today. Date: 12/2/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 22.22/30 Tylan 9-Poly DOWN Brown powder on wafers 0/30 Tylan 10-Nitride Up 11.05/30 Tylan 11-BPSG-LTO Up 30.4/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up Cleaned today ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 300 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at snf.stanford.edu Fri Dec 2 17:41:40 2005 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Fri, 02 Dec 2005 17:41:40 -0800 Subject: 2nd Poly test In-Reply-To: <438FAF67.8090309@snf.stanford.edu> References: <438DBCED.1000007@snf.stanford.edu> <438FAF67.8090309@snf.stanford.edu> Message-ID: <4390F7D4.4040503@snf.stanford.edu> After Ray and Dick rechecked the temps with a voltmeter I ran another test. It didn't run the whole 15 minutes. I came to take the readings in the middle of the dep step and it had already jumped to the post dep purge. I'll try again tomorrow and watched ever minute. -m Maurice Stevens wrote: > After the tube was pulled Ray checked the pump down, the flows and the > temp. > > I ran a polyemit test for 15 minutes and expected ~2000Ang. > > The wafers are brownish color on the edges and the back. The > thickness was ~300 Ang. From the tycom the temp, flows and pressure > looked normal. > > The wafers are in a box next to the tycom. > > > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at snf.stanford.edu Sat Dec 3 14:05:36 2005 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Sat, 03 Dec 2005 14:05:36 -0800 Subject: 3nd Poly test In-Reply-To: <4390F7D4.4040503@snf.stanford.edu> References: <438DBCED.1000007@snf.stanford.edu> <438FAF67.8090309@snf.stanford.edu> <4390F7D4.4040503@snf.stanford.edu> Message-ID: <439216B0.2050400@snf.stanford.edu> Within the first 5 seconds of the deposition step (65), the SiH4 flow rose from 0 to 200, the process pressure increased and the program jumped to step 75 . The SiH4 set point is 136. The program jumps to step 75 if the pressure reaches 1200 mtorr. Silane MFC dumping too much gas? Pump not handling the silane flow while silane MFC stabilizes? -m Maurice Stevens wrote: > After Ray and Dick rechecked the temps with a voltmeter I ran another > test. > > It didn't run the whole 15 minutes. I came to take the readings in > the middle of the dep step and it had already jumped to the post dep > purge. > > I'll try again tomorrow and watched ever minute. > > -m > > Maurice Stevens wrote: > >> After the tube was pulled Ray checked the pump down, the flows and >> the temp. >> >> I ran a polyemit test for 15 minutes and expected ~2000Ang. >> >> The wafers are brownish color on the edges and the back. The >> thickness was ~300 Ang. From the tycom the temp, flows and pressure >> looked normal. >> >> The wafers are in a box next to the tycom. >> >> >> >> > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From seymour at snf.stanford.edu Mon Dec 5 08:21:28 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Mon, 5 Dec 2005 08:21:28 -0800 Subject: Diffusion Morning Report Message-ID: <011301c5f9b7$f223c8d0$9a6540ab@bigvtwin> Good Morning All, Tylan1 had a loss of program this morning, Mike reloaded a recipe and it looks ok now. Tylanpoly is still down for deposition problems. Tylanbpsg is down for pull and clean. All else is looking good at this time. Date: 12/5/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 12.04/30 Tylan 9-Poly Down Brown powder on test 0/30 Tylan 10-Nitride Up 11.35/30 Tylan 11-BPSG-LTO Up Pull and clean 42/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 240 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From service at postcard.com Mon Dec 5 14:53:52 2005 From: service at postcard.com (Best Postcard) Date: Tue, 6 Dec 2005 07:53:52 +0900 Subject: Online Greeting Card Waiting For You Message-ID: <200512052253.jB5Mrqb07865@www.neofactory.jp> An HTML attachment was scrubbed... URL: From service at postcard.com Mon Dec 5 15:05:07 2005 From: service at postcard.com (Best Postcard) Date: Tue, 6 Dec 2005 08:05:07 +0900 Subject: Online Greeting Card Waiting For You Message-ID: <200512052305.jB5N57907690@www.neofactory.jp> An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Dec 6 09:16:18 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Tue, 6 Dec 2005 09:16:18 -0800 Subject: Diffusion Morning Report Message-ID: <001201c5fa88$c59527b0$9a6540ab@bigvtwin> Morning All, Tylan Poly and BPSG are waiting test results. BPSG also has a loader problem being addressed at this time. All else is looking good, so far. Date: 12/6/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 12.04/30 Tylan 9-Poly Down Testing 0/30 Tylan 10-Nitride Up 11.67/30 Tylan 11-BPSG-LTO Down Testing 0/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 240 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Dec 7 08:02:30 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Wed, 7 Dec 2005 08:02:30 -0800 Subject: Diffusion Morning Report Message-ID: <007a01c5fb47$a0c1ea80$9a6540ab@bigvtwin> Good Morning All, Everything is looking good this morning. Tylanpoly dep rate is very close to past good dep rate value. BPSG is up. Date: 12/7/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.16/30 Tylan 9-Poly Up Dep rate very close to normal .39/30 Tylan 10-Nitride Up 11.67/30 Tylan 11-BPSG-LTO Up 1.45/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 240 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Dec 8 08:34:29 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Thu, 8 Dec 2005 08:34:29 -0800 Subject: Diffusion Morning Report Message-ID: <00b801c5fc15$42fe4500$9a6540ab@bigvtwin> Morning All, Everything looking pretty good this morning. There are a couple of problems with discrete MFC zero's drifting. I haven't seen a update on poly dep rate since Linda gave us an update late Tursday. Date: 12/8/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Yellow O2 leak alarm O2 not leaking Tylan 8-SiGe Yellow SiH4 leak alarm SiH4 not leaking 13.4/30 Tylan 9-Poly Yellow Dep rate very close to normal .75/30 Tylan 10-Nitride Up 11.67/30 Tylan 11-BPSG-LTO Up 1.65/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 240 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Dec 9 07:54:06 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Fri, 9 Dec 2005 07:54:06 -0800 Subject: Diffusion Morning Report Message-ID: <010801c5fcd8$c923a8a0$9a6540ab@bigvtwin> Morning All, Everything looking pretty good this morning. Poly is back to normal deposition rates. The burnbox was cleaned this morning. Have a great weekend. Date: 12/9/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Yellow O2 leak alarm O2 not leaking Tylan 8-SiGe Yellow SiH4 leak alarm SiH4 not leaking 13.4/30 Tylan 9-Poly Up .9/30 Tylan 10-Nitride Up 11.74/30 Tylan 11-BPSG-LTO Up 1.7/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 235 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From security at paypal.com Sun Dec 11 18:22:35 2005 From: security at paypal.com (PayPal Inc.) Date: Sun, 11 Dec 2005 19:22:35 -0700 Subject: PayPal Security Measures ! Message-ID: <200512120222.jBC2MZ312720@duriel.tera-byte.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Dec 12 07:51:51 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 12 Dec 2005 07:51:51 -0800 Subject: Diffusion Morning Report 12/12/05 Message-ID: <439D9C97.4000408@snf.stanford.edu> Good Morning All, Looking good this morning. Several people out this morning. Everything else is looking good for now. Date: 12/12/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.4/30 Tylan 9-Poly Up 1.06/30 Tylan 10-Nitride Up 12.46/30 Tylan 11-BPSG-LTO Up 8.36/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 230 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Dec 13 06:49:35 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 13 Dec 2005 06:49:35 -0800 Subject: Diffusion Morning Report 12/12/05 Message-ID: <439EDF7F.5000604@snf.stanford.edu> Good Morning All, Looking good this morning. Sige didn't vent -looking into it. Everything else looks OK for now. Date: 12/13/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe yellow didn't vent 13.4/30 Tylan 9-Poly Up 1.18/30 Tylan 10-Nitride Up 12.85/30 Tylan 11-BPSG-LTO Up 10.74/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 200 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Dec 14 06:36:35 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 14 Dec 2005 06:36:35 -0800 Subject: Diffusion Morning Report 12/14/05 Message-ID: <43A02DF3.5070901@snf.stanford.edu> Good Morning All, Looking good this morning. Tylan 1 had several controller lockups yesterday-looking into it. Thermco nitride tube computer had to be reset yesterday. Everything else looks OK for now. Date: 12/14/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down Controller lockup problem Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.4/30 Tylan 9-Poly Up 2.3/30 Tylan 10-Nitride Up 12.97/30 Tylan 11-BPSG-LTO Up 13.43/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 170 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Dec 15 06:32:39 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 15 Dec 2005 06:32:39 -0800 Subject: Diffusion Morning Report 12/15/05 Message-ID: <43A17E87.2010403@snf.stanford.edu> Good Morning All, Looking good this morning. Tested Tylan 1 yesterday no problems since then. Getting ready for shutdown tomorrow morning. Everything else looks OK for now. Date: 12/15/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up tested yesterday Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly Up 3.8/30 Tylan 10-Nitride Up 12.97/30 Tylan 11-BPSG-LTO Up 14.3/30 Tylan 12-FGA Up Thermco 1 yellow problem with front zone temp Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 160 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From security at paypal.com Thu Dec 15 21:20:44 2005 From: security at paypal.com (PayPal Inc.) Date: Fri, 16 Dec 2005 00:20:44 -0500 Subject: PayPal UPDATE TEAM Message-ID: An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Dec 27 08:15:13 2005 From: nanotech at nsti.org (Nano World News) Date: Tue, 27 Dec 2005 08:15:13 -0800 Subject: Nano World News December Edition Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: