Poly test

Maurice Stevens maurice at snf.stanford.edu
Thu Dec 1 18:20:23 PST 2005


After the tube was pulled Ray checked the pump down, the flows and the temp.

I ran a polyemit test for 15 minutes and expected ~2000Ang.

The wafers are brownish color on the edges and the back.  The thickness 
was ~300 Ang.  From the tycom the temp, flows and pressure looked normal.

The wafers are in a box next to the tycom.




-- 

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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