maurice at snf.stanford.edu
Thu Dec 1 18:20:23 PST 2005
After the tube was pulled Ray checked the pump down, the flows and the temp.
I ran a polyemit test for 15 minutes and expected ~2000Ang.
The wafers are brownish color on the edges and the back. The thickness
was ~300 Ang. From the tycom the temp, flows and pressure looked normal.
The wafers are in a box next to the tycom.
maurice at stanford.edu
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
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