Diffusion Morning Report

Raymond Seymour seymour at snf.stanford.edu
Mon Dec 5 08:21:28 PST 2005


Good Morning All,

Tylan1 had a loss of program this morning, Mike reloaded a recipe and it
looks ok now. Tylanpoly is still down for deposition problems. Tylanbpsg is
down for pull and clean. All else is looking good at this time.

 

 


 

Date:

12/5/2005

THICKNESS-Change at


Tube Name/Number

Status

Comments

 


Tylan 1

Up

 

 


Tylan 2

Up

 

 


Tylan 3

Up

 

 


Tylan 4

Up

 

 


Tylan 5-BBr3

Up

 

 


Tylan 6-POCl3

Up

 

 


Tylan 7-TEOS2

Up

 

 


Tylan 8-SiGe

Up

 

12.04/30


Tylan 9-Poly

Down

Brown powder on test  

0/30


Tylan 10-Nitride

Up

 

11.35/30 


Tylan 11-BPSG-LTO

Up

Pull and clean

42/30


Tylan 12-FGA

Up

 

 


 

 

 

 


Thermco 1

yellow

problem with front zone temp

 


Thermco 2

Up

 

 


Thermco Poly

Up

 

 


Thermco Nitride

Down

Testing

 


 

 

 

 


Burn Box

Up

 

 


ZYGO

up

 

  


 

 

 

 


GAAS 22

UP

 

 


GAAS 23

UP

 

 


 

 

 

 


SiH4 for furnaces

 

B on line 240

 changeover working well 

 

 

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