Diffusion Morning Report

Raymond Seymour seymour at snf.stanford.edu
Thu Dec 8 08:34:29 PST 2005


 

Morning All,

Everything looking pretty good this morning. There are a couple of problems
with discrete MFC zero's drifting. I haven't seen a update on poly dep rate
since Linda gave us an update late Tursday.

 

 


 

 

Date:

12/8/2005

THICKNESS-Change at


Tube Name/Number

Status

Comments

 


Tylan 1

Up

 

 


Tylan 2

Up

 

 


Tylan 3

Up

 

 


Tylan 4

Up

 

 


Tylan 5-BBr3

Up

 

 


Tylan 6-POCl3

Up

 

 


Tylan 7-TEOS2

Yellow

O2 leak alarm  O2 not leaking

 


Tylan 8-SiGe

Yellow

SiH4 leak alarm SiH4 not leaking

13.4/30


Tylan 9-Poly

Yellow

Dep rate very close to normal

.75/30


Tylan 10-Nitride

Up

 

11.67/30 


Tylan 11-BPSG-LTO

Up

 

1.65/30


Tylan 12-FGA

Up

 

 


 

 

 

 


Thermco 1

yellow

problem with front zone temp

 


Thermco 2

Up

 

 


Thermco Poly

Up

 

 


Thermco Nitride

Down

Testing

 


 

 

 

 


Burn Box

Up

 

 


ZYGO

up

 

  


 

 

 

 


GAAS 22

UP

 

 


GAAS 23

UP

 

 


 

 

 

 


SiH4 for furnaces

 

B on line 240

 changeover working well 

 

 

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