Diffusion Morning Report 12/14/05

Ted Berg tberg at snf.stanford.edu
Wed Dec 14 06:36:35 PST 2005


Good Morning All,
    Looking good this morning.  Tylan 1 had several controller lockups 
yesterday-looking into it. Thermco nitride tube computer
had to be reset yesterday.  Everything else looks OK for now.

  	Date: 	12/14/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Down 	Controller lockup problem 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	13.4/30
Tylan 9-Poly 	Up 	  	2.3/30
Tylan 10-Nitride 	Up 	  	12.97/30 
Tylan 11-BPSG-LTO 	Up 	  	13.43/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	yellow 	problem with front zone temp 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	B on line 170 	 changeover working well 


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