From tberg at snf.stanford.edu Tue Feb 1 06:49:15 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 01 Feb 2005 06:49:15 -0800 Subject: Diffusion Morning Report 02/01/05 Message-ID: <41FF96EB.5090106@snf.stanford.edu> Good Morning All, Looking pretty good this morning. GeH4 and HCl for epi cylinders changed yesterday. Leak on Epi repaired. SiGe- SiH4 zero drift. Ebeam still in High Vac. Everything else looks OK for now. . Date: 2/1/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow SiH4 leak 12.33.0/30 Tylan 9-Poly Up 17.59/30 Tylan 10-Nitride Up 11.03/30 Tylan 11-BPSG-LTO Up 15.93/30 Tylan 12-FGA Up Tystar yellow 3.48/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 480 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 2 06:30:36 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 02 Feb 2005 06:30:36 -0800 Subject: Diffusion Morning Report 02/02/05 Message-ID: <4200E40C.5010304@snf.stanford.edu> Good Morning All, Looking good this morning. Implanter is out of Arsine we should get it this morning. Testing Teos2. MFC ordered for SiGe, Ebeam still in high vac. Everything else looks OK for now, . Date: 2/2/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow SiH4 leak 12.33.0/30 Tylan 9-Poly Up 17.69/30 Tylan 10-Nitride Up 11.1/30 Tylan 11-BPSG-LTO Up 17.69/30 Tylan 12-FGA Up Tystar yellow 3.48/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 480 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 3 07:25:05 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 03 Feb 2005 07:25:05 -0800 Subject: Diffusion Morning Report 02/03/05 Message-ID: <42024251.5030908@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Burn box clean this morning. Epi has pressure control issues-checking it out. TEOS 2 tested yesterday. SiGe alarms for SiH4-mfc ordered. E beam still in High Vac . Everything else is OK for now. . Date: 2/3/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow SiH4 leak 12.33.0/30 Tylan 9-Poly Up 19.13/30 Tylan 10-Nitride Up 11.56/30 Tylan 11-BPSG-LTO Up 19.4/30 Tylan 12-FGA Up Tystar yellow 3.48/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 470 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 4 06:47:32 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 04 Feb 2005 06:47:32 -0800 Subject: Diffusion Morning Report 02/04/05 Message-ID: <42038B04.9010501@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Ebeam is still in High vac and Paul J is working on it. SiH4 MFC is here for SiGe and we will change it when we get a chance. Burn box cleaned this morning. TEOS2 test came out good yesterday-may be a followup for verification. Everything else looking OK for now. . Date: 2/4/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow SiH4 leak 12.33.0/30 Tylan 9-Poly Up 19.23/30 Tylan 10-Nitride Up 11.56/30 Tylan 11-BPSG-LTO Up 19.4/30 Tylan 12-FGA Up 20.27/30 Tystar yellow 3.48/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Feb 7 06:31:17 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 07 Feb 2005 06:31:17 -0800 Subject: Diffusion Morning Report 02/07/05 Message-ID: <42077BB5.3020200@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Changing SiH4 Mfc on SiGe. Ebeam still in High Vac. Everything else looks OK for now. . Date: 2/7/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down SiH4 leak-changing mfc 12.33.0/30 Tylan 9-Poly Up 19.23/30 Tylan 10-Nitride Up 12.46/30 Tylan 11-BPSG-LTO Up 20.91/30 Tylan 12-FGA Up Tystar yellow 3.48/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 8 06:34:18 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 08 Feb 2005 06:34:18 -0800 Subject: Diffusion Morning Report 02/08/05 Message-ID: <4208CDEA.3060706@snf.stanford.edu> Good Morning All, Looking pretty good this morning. SiGe tube was changed due to cracked sheaths, SiH4 MFC was changed. It will need a coat and test. Epi is down again for safety B- looking into it. Ebeam is still in High Vac and Paul J is working on it. Injector was changed on Tylan 1.. Everything else looks OK for now. Date: 2/8/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down Tube pulled and MFC changed 0/30 Tylan 9-Poly Up 18.82/30 Tylan 10-Nitride Up 12.56/30 Tylan 11-BPSG-LTO Up 21.45/30 Tylan 12-FGA Up Tystar yellow 3.73/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 9 06:35:58 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 09 Feb 2005 06:35:58 -0800 Subject: Diffusion Morning Report 02/09/05 Message-ID: <420A1FCE.3000703@snf.stanford.edu> Good Morning All, Looking pretty good this morning. SiGe is waiting for a test. TEOS 2 is testing, Thermco Poly is testing. Everything else is OK for now. Date: 2/9/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down needs test 0/30 Tylan 9-Poly Up 18.82/30 Tylan 10-Nitride Up 12.56/30 Tylan 11-BPSG-LTO Up 21.65/30 Tylan 12-FGA Up Tystar yellow 3.93/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 440 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 10 06:26:04 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 10 Feb 2005 06:26:04 -0800 Subject: Diffusion Morning Report 02/10/05 Message-ID: <420B6EFC.1040404@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Epi is waiting for a reflector that melted yesterday. SiGe needs test still some issues. B2H6 turned on to Thermco Poly. Teos 2 testing. Everything else looks OK for now. Date: 2/10/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down needs test 0/30 Tylan 9-Poly Up 18.82/30 Tylan 10-Nitride Up 12.56/30 Tylan 11-BPSG-LTO Up 21.65/30 Tylan 12-FGA Up Tystar yellow 6.93/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 430 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 11 06:35:45 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 11 Feb 2005 06:35:45 -0800 Subject: Diffusion Morning Report 02/11/05 Message-ID: <420CC2C1.9060306@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Epi is back up after brief meltdown-thanks Mike. Sige still has some issues with flows. Burn box cleaned this morning. TEOS 2 and Thermco Poly Testing. Everything else looks OK for now. Date: 2/11/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down needs test-Flow issues 0/30 Tylan 9-Poly Up 19.5/30 Tylan 10-Nitride Up 12.6/30 Tylan 11-BPSG-LTO Up 22.58/30 Tylan 12-FGA Up Tystar yellow 6.93/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 430 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Feb 14 07:04:24 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 14 Feb 2005 07:04:24 -0800 Subject: Diffusion Morning Report 02/14/05 Message-ID: <4210BDF8.2010301@snf.stanford.edu> Happy Valentines Day All, Looking pretty good this morning. Someon had moved /deleted the applications on Zygo-reinstalled. Burn box cleaned again this morning in prep for 3.9 micron run on Nitride. Ebeam cryo # 2 being regened-waiting for news from Hitachi. Everything else looks OK for now. Date: 2/14/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down gas flow issues 0/30 Tylan 9-Poly Up 20.69/30 Tylan 10-Nitride Up 13.05/30 Tylan 11-BPSG-LTO Up 23.03/30 Tylan 12-FGA Up Tystar yellow 6.93/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 420 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 15 06:48:36 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 15 Feb 2005 06:48:36 -0800 Subject: Diffusion Morning Report 02/15/05 Message-ID: <42120BC4.6020702@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Ebeam in High vac after regen-vacuum looking good. Waiting for Hitachi commitment. Burn box will be this morning after long Nitride run. TEOS2 and Thermco Poly testing. Sige still has gas valve problems- parts ordered. Everything else looks OK for Now. > > Date: 2/15/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down gas flow issues 0/30 Tylan 9-Poly Up 20.69/30 Tylan 10-Nitride Up 13.05/30 Tylan 11-BPSG-LTO Up 23.03/30 Tylan 12-FGA Up Tystar yellow 6.93/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 420 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 16 06:37:13 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 16 Feb 2005 06:37:13 -0800 Subject: Diffusion Morning Report 02/16/05 Message-ID: <42135A99.5000200@snf.stanford.edu> Good Morning All, Looking Good this morning. Epi HCl cylinder changed yesterday will be back on near noon. SiGe-gas valve problems parts ordered. Thermco poly and TEOS2 testing. Ebeam is in High vac. Everything else is OK for now. Date: 2/16/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down gas flow issues 0/30 Tylan 9-Poly Up 20.69/30 Tylan 10-Nitride Up 16.95/30 Tylan 11-BPSG-LTO Up 23.21/30 Tylan 12-FGA Up Tystar yellow 6.93/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 380 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From personalbanking at checking-02.wamu.com Thu Feb 17 01:19:42 2005 From: personalbanking at checking-02.wamu.com (WAMU Personal Online Banking) Date: Thu, 17 Feb 2005 18:19:42 +0900 Subject: Online banking records confirmation Message-ID: <200502170919.j1H9Jge19319@web-11.blueweb.co.kr> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 17 06:26:16 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 17 Feb 2005 06:26:16 -0800 Subject: Diffusion Morning Report 02/17/05 Message-ID: <4214A988.1090904@snf.stanford.edu> Good Morning All, Looking Good this morning. Replaced pump for TEOS yesterday-looks good now. SiGe has gas valve problems-should have parts today.. TEOS2 and Thermco poly testing. Everything else looks OK for now. Date: 2/17/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down gas flow issues 0/30 Tylan 9-Poly Up 21.23/30 Tylan 10-Nitride Up 17.17/30 Tylan 11-BPSG-LTO Up 26.23/30 Tylan 12-FGA Up Tystar yellow 6.93/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Feb 18 08:37:31 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 18 Feb 2005 08:37:31 -0800 Subject: Diffusion Morning Report Message-ID: <421619CB.16424348@snf.stanford.edu> Good Morning all, Ted is out this morning. Everything looking pretty good this morning. The burnbox was cleaned this morning. The Silane flow issue with SIGE has been addressed, there was a flow error with the backfill on step 140 during yesterday's test. Have a safe holiday. Diffusion Date: 2/18/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Yellow Gas flow issues ?/30 Tylan 9-Poly Up 21.25/30 Tylan 10-Nitride Up 19.07/30 Tylan 11-BPSG-LTO Up 27.06/30 Tylan 12-FGA Up Tystar Up 18.37/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 330 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Feb 21 20:31:12 2005 From: nanotech at nsti.org (NSTI Nanotech Ventures) Date: Mon, 21 Feb 2005 20:31:12 -0800 Subject: NSTI Nanotech Ventures - May 8-12, Anaheim, California Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 22 06:44:47 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 22 Feb 2005 06:44:47 -0800 Subject: Diffusion Morning Report 02/22/05 Message-ID: <421B455F.40604@snf.stanford.edu> Good Morning All and welcome back, Looking pretty good this morning. TEOS has pressure control problems-looking into it. BPSG is going down on Thursday for tube clean. TEOS2 and Thermco Poly testing. Everything else looking OK for now. Date: 2/22/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 0/30 Tylan 9-Poly Up 21.61/30 Tylan 10-Nitride Up 19.07/30 Tylan 11-BPSG-LTO Up 28.78/30 Tylan 12-FGA Up Tystar yellow 6.93/30 Doped Poly GONE TEOS down pressure control Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 270 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 23 06:38:15 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 23 Feb 2005 06:38:15 -0800 Subject: Diffusion Morning Report 02/23/05 Message-ID: <421C9557.1020607@snf.stanford.edu> Good Morning All, Looking OK this morning. TEOS had several issues-looking into it.. LTO down tomorrow for pull and clean. GeH4 for SiGe is back on. Everything else looks OK for now. Date: 2/22/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up germane cylinder changed .68/30 Tylan 9-Poly Up 21.7/30 Tylan 10-Nitride Up 19.07/30 Tylan 11-BPSG-LTO Up 30.35/30 Tylan 12-FGA Up Tystar yellow 24.06/30 Doped Poly GONE TEOS down pressure issues Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 270 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 24 06:36:34 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 24 Feb 2005 06:36:34 -0800 Subject: Diffusion Morning Report 02/24/05 Message-ID: <421DE672.4040405@snf.stanford.edu> Good Morning All, Looking good this morning. LTO is down for scheduled pull and clean. Teos2 and Thermco testing. Tylan 1 had MFS alarm-watching. Everything else looks OK for now. Date: 2/24/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up .68/30 Tylan 9-Poly Up 21.81/30 Tylan 10-Nitride Up 21.47/30 Tylan 11-BPSG-LTO down pull and clean 0/30 Tylan 12-FGA Up Tystar yellow 24.06/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 240 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 25 07:15:45 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 25 Feb 2005 07:15:45 -0800 Subject: Diffusion Morning Report 02/25/05 Message-ID: <421F4121.6080900@snf.stanford.edu> Good Morning All, Looking Good this morning. LTO is going back together after pull and clean. TEOS-replaced Throttle valve. Burn box cleaned this morning. Everything else looking OK for now. Date: 2/25/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up .92/30 Tylan 9-Poly Up 21.81/30 Tylan 10-Nitride Up 22.47/30 Tylan 11-BPSG-LTO down pull and clean 0/30 Tylan 12-FGA Up Tystar yellow 26.51/30 Doped Poly GONE TEOS yellow Replaced Throttle valve Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 220 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Feb 28 06:46:54 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 28 Feb 2005 06:46:54 -0800 Subject: Diffusion Morning Report 02/28/05 Message-ID: <42232EDE.8010509@snf.stanford.edu> Good Morning All, Looking good this morning. LTO had a possible leak issue-looking into it. Epi had a bad lamp-replaced. TEOS2 band Thermco poly testing. Everything else looks OK for now. Date: 2/28/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 1.41/30 Tylan 9-Poly Up 22.65/30 Tylan 10-Nitride Up 22.77/30 Tylan 11-BPSG-LTO Up pull and clean completed 1.25/30 Tylan 12-FGA Up Tystar yellow 31.61/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 180 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: