Diffusion Morning Report 02/04/05

Ted Berg tberg at snf.stanford.edu
Fri Feb 4 06:47:32 PST 2005

Good Morning All,
    Looking pretty good this morning.  Ebeam is still in High vac and 
Paul J is working on it. SiH4 MFC is here for SiGe and we will change it 
when we get a chance.
Burn box cleaned this morning.  TEOS2 test came out good yesterday-may 
be a followup for verification. Everything else looking OK for now.

. 	Date: 	2/4/2005 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	yellow 	SiH4 leak 	12.33.0/30
Tylan 9-Poly 	Up 	  	19.23/30
Tylan 10-Nitride 	Up 	  	11.56/30
Tylan 11-BPSG-LTO 	Up 	  	19.4/30
Tylan 12-FGA 	Up 	  	 20.27/30
Tystar 	yellow 	  	3.48/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 460 PSI

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