Diffusion Morning Report 02/09/05
Ted Berg
tberg at snf.stanford.edu
Wed Feb 9 06:35:58 PST 2005
Good Morning All,
Looking pretty good this morning. SiGe is waiting for a test. TEOS 2
is testing, Thermco Poly is testing. Everything else is OK for now.
Date: 2/9/2005 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down Qual testing
Tylan 8-SiGe down needs test 0/30
Tylan 9-Poly Up 18.82/30
Tylan 10-Nitride Up 12.56/30
Tylan 11-BPSG-LTO Up 21.65/30
Tylan 12-FGA Up
Tystar yellow 3.93/30
Doped Poly GONE
TEOS up
Tylan 16 N/A
Thermco 1 Up
Thermco 2 Up
Thermco Poly yellow testing doped
Thermco Nitride Down Waiting
Burn Box Up
ZYGO up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Auto changeover working well A on line 440 PSI
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