Diffusion Morning Report 02/10/05

Ted Berg tberg at snf.stanford.edu
Thu Feb 10 06:26:04 PST 2005

Good Morning All,
    Looking pretty good this morning.  Epi is waiting for a reflector 
that melted yesterday. SiGe needs test still some issues. B2H6 turned on
to Thermco Poly.  Teos 2 testing.  Everything else looks OK for now.

  	Date: 	2/10/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	down 	needs test 	0/30
Tylan 9-Poly 	Up 	  	18.82/30
Tylan 10-Nitride 	Up 	  	12.56/30
Tylan 11-BPSG-LTO 	Up 	  	21.65/30
Tylan 12-FGA 	Up 	  	 
Tystar 	yellow 	  	6.93/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 430 PSI

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