Diffusion Morning Report 02/14/05

Ted Berg tberg at snf.stanford.edu
Mon Feb 14 07:04:24 PST 2005

Happy Valentines Day All,
    Looking pretty good this morning. Someon had moved /deleted the 
applications on Zygo-reinstalled. Burn box cleaned again this
morning in prep for 3.9 micron run on Nitride. Ebeam cryo # 2 being 
regened-waiting for news from Hitachi.  Everything else looks OK for now.

  	Date: 	2/14/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	down 	gas flow issues 	0/30
Tylan 9-Poly 	Up 	  	20.69/30
Tylan 10-Nitride 	Up 	  	13.05/30
Tylan 11-BPSG-LTO 	Up 	  	23.03/30
Tylan 12-FGA 	Up 	  	 
Tystar 	yellow 	  	6.93/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	Cleaned this morning 	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 420 PSI

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