Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Fri Feb 18 08:37:31 PST 2005


Good Morning all,
Ted is out this morning. Everything looking pretty good this morning.
The burnbox was cleaned this morning. The Silane flow issue with SIGE
has been addressed, there was a flow error with the backfill on step 140
during yesterday's test. Have a safe holiday.



Diffusion                             Date:                   2/18/2005
Tube Name/Number            Status
Comments                                THICKNESS-Change at
Tylan 1                               Up
Tylan 2                               Up
Tylan 3                               Up
Tylan 4                               Up
Tylan 5-BBr3                      Up
Tylan 6-POCl3                    Up
Tylan 7-TEOS2                   down                   Qual testing
Tylan 8-SiGe                       Yellow                 Gas flow
issues                      ?/30
Tylan 9-Poly
Up
21.25/30
Tylan 10-Nitride
Up
19.07/30
Tylan 11-BPSG-LTO
Up
27.06/30
Tylan 12-FGA                     Up
Tystar
Up
18.37/30
Doped Poly                         GONE
TEOS                                 Up
Tylan 16                             N/A
Yhermco 1                         UP
Thermco 1                          UP
Thermco Poly                     Yellow
Thermco Nitride                  Down                    Waiting

Burn Box Up

ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                                              Auto
changeover working well  A on line 330 PSI





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