Diffusion Morning Report 02/22/05

[Ted Berg]

Good Morning All and welcome back,
    Looking pretty good this morning.  TEOS has pressure control 
problems-looking into it.  BPSG is going down on Thursday for tube clean.
TEOS2 and Thermco Poly testing.  Everything else looking OK for now.

  	Date: 	2/22/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up
	
	0/30
Tylan 9-Poly 	Up 	  	21.61/30
Tylan 10-Nitride 	Up 	  	19.07/30
Tylan 11-BPSG-LTO 	Up 	  	28.78/30
Tylan 12-FGA 	Up 	  	 
Tystar 	yellow 	  	6.93/30 
Doped Poly 	GONE 	  	 
TEOS 	down 	pressure control 	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well  	A on line 270 PSI


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