Diffusion Morning Report 02/23/05

Ted Berg tberg at snf.stanford.edu
Wed Feb 23 06:38:15 PST 2005

Good Morning All,
    Looking OK this morning. TEOS had several issues-looking into it..  
LTO down tomorrow for pull and clean. GeH4 for SiGe is back on.
Everything else looks OK for now.
  	Date: 	2/22/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	germane cylinder changed 	.68/30
Tylan 9-Poly 	Up 	  	21.7/30
Tylan 10-Nitride 	Up 	  	19.07/30
Tylan 11-BPSG-LTO 	Up 	  	30.35/30
Tylan 12-FGA 	Up 	  	 
Tystar 	yellow 	  	24.06/30
Doped Poly 	GONE 	  	 
TEOS 	down 	pressure issues
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well  	A on line 270 PSI

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