From tberg at snf.stanford.edu Mon Jan 3 07:47:20 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 03 Jan 2005 07:47:20 -0800 Subject: Diffusion Morning Report 01/03/05 Message-ID: <41D96908.3040205@snf.stanford.edu> Good Morning All, Happy New Year and welcome back. Here is a somewhat abbreviated status as of now. Gases for LPs are turn back on and Nitride, Poly and LTO are in test. Epi has had HCl changed and burnbox has been rebuilt and a fuse for the heaters replaced. Sinks are uncovered. 3 cylinders for Implanter were changed. Startup is continuing. From eBay at eBay.com Mon Jan 3 14:06:56 2005 From: eBay at eBay.com (eBay) Date: Mon, 3 Jan 2005 14:06:56 -0800 Subject: eBay Network Overload Problem Message-ID: <200501032206.j03M6ue24336@www.netoptinc.net> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 4 06:35:09 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 04 Jan 2005 06:35:09 -0800 Subject: Diffusion Morning Report 01/04/05 Message-ID: <41DAA99D.8060700@snf.stanford.edu> Good Morning Alll, Wecome back again. Thanks to everyone who helped during the shutdown and startup. Overall i think it went quite well. Epi as well as the LP tubes are back up. Most issues on the wet benches are resolved. Implant still has some vacuum issues as does Hitachi 700. Everything else looks OK for now. . Date: 1/4/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 10.16/30 Tylan 10-Nitride Up 2.39/30 Tylan 11-BPSG-LTO Up .41/30 Tylan 12-FGA Up Tystar Up 26.1.3/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jan 5 06:45:09 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 05 Jan 2005 06:45:09 -0800 Subject: Diffusion Morning Report 01/05/05 Message-ID: <41DBFD75.3000603@snf.stanford.edu> Good Morning All, Looking good this morning. Implanter is back in High Vac running an argon beam. E beam still has vacuum issues-investigating. Everything else looks OK for now. . Date: 1/5/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 10.16/30 Tylan 10-Nitride Up 2.7/30 Tylan 11-BPSG-LTO Up 1.03/30 Tylan 12-FGA Up Tystar Up 26.1/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 6 06:37:44 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 06 Jan 2005 06:37:44 -0800 Subject: Diffusion Morning Report 01/06/05 Message-ID: <41DD4D38.6030600@snf.stanford.edu> Good Morning All, Looking pretty good this Morning. Possible particle issues on Nitride. Ebeam vacuum issues Everything else looking OK for now. . Date: 1/6/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 10.16/30 Tylan 10-Nitride Up 2.85/30 Tylan 11-BPSG-LTO Up 1.03/30 Tylan 12-FGA Up Tystar Up 26.1/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 7 06:36:56 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 07 Jan 2005 06:36:56 -0800 Subject: Diffusion Morning Report 01/07/05 Message-ID: <41DE9E88.7010703@snf.stanford.edu> Good Morning All, Happy Friday. We are still looking good this morning. Corrected a small error in recipe WET1100 . Ebeam still has vacuum problems. Burn box was still ok but it was checked again this morning. Everything else looks OK for Now. . Date: 1/6/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 10.16/30 Tylan 10-Nitride Up 2.85/30 Tylan 11-BPSG-LTO Up 2.14/30 Tylan 12-FGA Up Tystar Up 26.1/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jan 10 06:45:10 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 10 Jan 2005 06:45:10 -0800 Subject: Diffusion Morning Report 01/10/05 Message-ID: <41E294F6.3030104@snf.stanford.edu> Good Morning All. Looking pretty good this morning. Stiil problems with Ebeam vacuum . otherwise we are looking OK for now. . Date: 1/6/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 10.4/30 Tylan 10-Nitride Up 2.85/30 Tylan 11-BPSG-LTO Up 2.14/30 Tylan 12-FGA Up Tystar Up 26.7/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 11 06:40:47 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 11 Jan 2005 06:40:47 -0800 Subject: Diffusion Morning Report 01/11/05 Message-ID: <41E3E56F.3060106@snf.stanford.edu> Good Morning All, Looking Good again this morning. Germane for Epi is getting low and will probably need to be changed. Found the problem on Ebeam cryos-waiting parts. Everything else looks ok for now. . Date: 1/11/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 10.94/30 Tylan 10-Nitride Up 3.67/30 Tylan 11-BPSG-LTO Up 2.2/30 Tylan 12-FGA Up Tystar Up 26.1/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jan 12 06:35:56 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 12 Jan 2005 06:35:56 -0800 Subject: Diffusion Morning Report 01/12/05 Message-ID: <41E535CC.3060702@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Possible pumping problem with Nitride. Tylan 1 had an MFS alarm for O2/H2 ratio that was reset and run came out thin. One cryo on Ebeam is ok still checking on the other. Everything else looks OK for now. . Date: 1/12/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 10.96/30 Tylan 10-Nitride Down Failed Leak check 3.67/30 Tylan 11-BPSG-LTO Up 3.87/30 Tylan 12-FGA Up Tystar Up 26.9/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 565 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 13 06:31:01 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 13 Jan 2005 06:31:01 -0800 Subject: Diffusion Morning Report 01/13/05 Message-ID: <41E68625.6040406@snf.stanford.edu> Good Morning All, Looking good this morning. Epi gases are back on after cylinder change. TEOS2 and Thermco Poly testing. Ebeam waiting for replacement Cryo. Everything else looks OK for now. . Date: 1/13/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 11.78/30 Tylan 10-Nitride Up 3.67/30 Tylan 11-BPSG-LTO Up 4.15/30 Tylan 12-FGA Up Tystar Up 27.7/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 565 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 14 06:25:58 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 14 Jan 2005 06:25:58 -0800 Subject: Diffusion Morning Report 01/14/05 Message-ID: <41E7D676.8050404@snf.stanford.edu> Good Morning All, Looking good this morning. Burn box cleaned this morning. Tystar is getting close to clean it is at 28 microns. Epi is back up after lamp and fuse change. Ordering Cryo for ebeam. TEOS2 message going out. Everything else is ok for now. . Date: 1/14/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 11.78/30 Tylan 10-Nitride Up 3.67/30 Tylan 11-BPSG-LTO Up 4.15/30 Tylan 12-FGA Up Tystar Up 27.7/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 565 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Jan 17 17:46:39 2005 From: nanotech at nsti.org (Nano Science and Technology Institute) Date: Mon, 17 Jan 2005 17:46:39 -0800 Subject: Nanotech Courses - Davos Switzerland - March 21-24, 2005 Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 18 06:57:25 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 18 Jan 2005 06:57:25 -0800 Subject: Diffusion Morning Report 01/18/05 Message-ID: <41ED23D5.4060707@snf.stanford.edu> Good Morning All, Looing pretty good this morning. Tystar is locked up-looking into it. Epi had a problem with Germane-turned up reg. Cryo for ebeam ordered on Friday. Everything else looks ok for now. . Date: 1/18/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 12.36/30 Tylan 10-Nitride Up 4.37/30 Tylan 11-BPSG-LTO Up 5.77/30 Tylan 12-FGA Up Tystar down Screen frozen 27.7/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 565 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jan 19 07:09:50 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 19 Jan 2005 07:09:50 -0800 Subject: Diffusion Morning Report 01/19/05 Message-ID: <41EE783E.5030302@snf.stanford.edu> Good Morning All, Looking fair this morning. Epi is still having backfill problems . Tystar has computer issues and is also down for pull and clean. Cryo pump for ebeam P.O. is written-waiting on purchasing. Everything else looks OK for now. . Date: 1/19/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 12.8/30 Tylan 10-Nitride Up 7.1/30 Tylan 11-BPSG-LTO Up 10.68/30 Tylan 12-FGA Up Tystar down Screen frozen/pull and clean 30.7/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 20 06:27:21 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 20 Jan 2005 06:27:21 -0800 Subject: Diffusion Morning Report 01/20/05 Message-ID: <41EFBFC9.60007@snf.stanford.edu> Good Morning All, Looking OK this morning. EPI backfill continues to be a problem-looking into it. Tystar is pulled and cleaned but computer is still messed up. Austin is coming out to look at down cryo on Ebeam. Everything else looks OK for now. . Date: 1/20/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 12.8/30 Tylan 10-Nitride Up 7.4/30 Tylan 11-BPSG-LTO Up 11.3/30 Tylan 12-FGA Up Tystar down Screen frozen/pull and clean 0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 21 06:50:15 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 21 Jan 2005 06:50:15 -0800 Subject: Diffusion Morning Report 01/21/05 Message-ID: <41F116A7.5070708@snf.stanford.edu> Good Morning All, Looking OK this morning. Burn box cleaned this morning. New board for Tystar should be here today. Epi wafers removed from chamber and in leak check. Austin Scientific in yesterday to look at dead cryo on ebeam they will be back today to try an in situ fix. Everything else looking OK for now. . Date: 1/21/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 12.95/30 Tylan 10-Nitride Up 7.4/30 Tylan 11-BPSG-LTO Up 11.93/30 Tylan 12-FGA Up Tystar down Screen frozen/pull and clean 0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Jan 24 09:01:16 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 24 Jan 2005 09:01:16 -0800 Subject: Diffusion Morning report Message-ID: <41F529DC.393B5BB5@snf.stanford.edu> Morning All, Ted is busy worning in the fab this morning so I am doing the report. things are looking up this morning. Tystar is completing a coat and the test will be done by the user. Sige has a Silane flow problem. All else looking good Date: 1/24/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Yellow Silane flow issues 12.33/30 Tylan 9-Poly Up 13.74/30 Tylan 10-Nitride Up observation 7.73/30 Tylan 11-BPSG-LTO Up 14.09/30 Tylan 12-FGA Up Tystar Yellow tube coat in process 0/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow Testing Doped Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 530 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 25 06:31:28 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 25 Jan 2005 06:31:28 -0800 Subject: Diffusion Morning Report 01/25/05 Message-ID: <41F65840.9050400@snf.stanford.edu> Good Morning All, Looking OK this morning. Tystar is back with us and coated testing in progress. Epi HCL needs to be changed. SiGe has problems with gas flows in auto. Austin will be in this morning to address cryo He lines. Everything else looks OK for now. . Date: 1/25/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow gas flow problems in auto 12.33.0/30 Tylan 9-Poly Up 13.74/30 Tylan 10-Nitride Up 9.0/30 Tylan 11-BPSG-LTO Up 14.09/30 Tylan 12-FGA Up Tystar yellow coated needs test 0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jan 26 06:24:12 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 26 Jan 2005 06:24:12 -0800 Subject: Diffusion Morning Report 01/26/05 Message-ID: <41F7A80C.50608@snf.stanford.edu> Good Morning All, Looking good this morning. SiGe still having gas flow problems in Auto-suspect Power supply, Epi should be back up after cylinder change. Austin will be in this morning to address Cryo issues on ebeam. Tystar ran yesterday may still be a few bugs in recipes. Everything else looks OK for now. . Date: 1/26/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow gas flow problems in auto 12.33.0/30 Tylan 9-Poly Up 13.88/30 Tylan 10-Nitride Up 9.28/30 Tylan 11-BPSG-LTO Up 14.09/30 Tylan 12-FGA Up Tystar yellow coated needs test 3.0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 27 06:43:16 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 27 Jan 2005 06:43:16 -0800 Subject: Diffusion Morning Report 01/27/05 Message-ID: <41F8FE04.1040607@snf.stanford.edu> Good Morning All, Looking OK this morning. SiGe is still having problems with Auto gas flows. TEOS 2 is testing as is THERMCO Poly. Tylan 4 had an O2 leak alarm-adjusted zero. Austin was in yesterday and checked out He lines and removed expander on second Cryo they will be back today to reinstall. THERMCO bank 2 install is getting closer Stay tuned. Will test another Tystar recipe today. Everything else looks ok for now. . Date: 1/27/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down gas flow problems in auto 12.33.0/30 Tylan 9-Poly Up 13.88/30 Tylan 10-Nitride Up 9.59/30 Tylan 11-BPSG-LTO Up 14.09/30 Tylan 12-FGA Up Tystar yellow coated needs test 3.0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 525 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 28 06:18:56 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 28 Jan 2005 06:18:56 -0800 Subject: Diffusion Morning Report 01/27/05 Message-ID: <41FA49D0.3060208@snf.stanford.edu> Good Morning All. Looking prettty good this morning. SiGe is back up and Tystar appers to be working OK. Austin will be back in today to recharge He lines and replace expander in cryo 1.Burn box cleaned this morning. Thermco 2 move is coming. Everything else looks OK for now. . Date: 1/28/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33.0/30 Tylan 9-Poly Up 14.12/30 Tylan 10-Nitride Up 9.59/30 Tylan 11-BPSG-LTO Up 15.52/30 Tylan 12-FGA Up Tystar yellow tested 3.0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jan 31 06:47:05 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 31 Jan 2005 06:47:05 -0800 Subject: Diffusion Morning Report 01/31/05 Message-ID: <41FE44E9.5090006@snf.stanford.edu> Good Morning All, Looking OK this morning. GeH4 and HCl for EPI are low and need to be changed . SiH4 zero had drifted for SiGe- will check it out. Everything else looks OK for now. . Date: 1/31/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow SiH4 leak 12.33.0/30 Tylan 9-Poly Up 17.52/30 Tylan 10-Nitride Up 11.03/30 Tylan 11-BPSG-LTO Up 15.65/30 Tylan 12-FGA Up Tystar yellow 3.0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 480 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Jan 31 22:49:56 2005 From: nanotech at nsti.org (Nanotech 2005) Date: Mon, 31 Jan 2005 22:49:56 -0800 Subject: Nanotech 2005 Conference Technical Program - Register Now Message-ID: An HTML attachment was scrubbed... URL: