From tberg at snf.stanford.edu Wed Jun 1 07:24:00 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 01 Jun 2005 07:24:00 -0700 Subject: Diffusion Morning Report 06/01/05 Message-ID: <429DC500.8090303@snf.stanford.edu> Good Morning All, Happy June day. Looking pretty good this morning. Epi is down for HCl cylinder change. LTO is waiting for test results after pull and clean. Everything else looks OK for now. Date: 6/1/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 2.34/30 Tylan 10-Nitride yellow Particles look good 13.39/30 Tylan 11-BPSG-LTO Down needs test 0/30 Tylan 12-FGA Up Tystar Up 2.89/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 260 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 2 06:46:57 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 02 Jun 2005 06:46:57 -0700 Subject: Diffusion Morning Report 06/02/05 Message-ID: <429F0DD1.6080409@snf.stanford.edu> Good Morning All, Looking good this morning. HCl for epi should be ready today. LTO is back up. Nitride has been behaving(as far as i Know). Everything else looks OK for now. Date: 6/2/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 2.49/30 Tylan 10-Nitride yellow Particles look good 13.39/30 Tylan 11-BPSG-LTO Up .13/30 Tylan 12-FGA Up Tystar Up 3.58/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 240 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 3 06:28:30 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 03 Jun 2005 06:28:30 -0700 Subject: Diffusion Morning Report 06/03/05 Message-ID: <42A05AFE.2000704@snf.stanford.edu> Good Morning All, Looking good this morning. Burn box cleaned this morning. Everything else looking OK for now. Date: 6/3/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 2.66/30 Tylan 10-Nitride yellow Particles look good 13.39/30 Tylan 11-BPSG-LTO Up 2.23/30 Tylan 12-FGA Up Tystar Up 3.58/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 235 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 6 06:28:34 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 06 Jun 2005 06:28:34 -0700 Subject: Diffusion Morning Report 06/06/05 Message-ID: <42A44F82.20901@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride is having intermittant problems with pumping or gate valve-looking into it. Everything else looks OK for now. Tystar log needs attention. It is very confusing. Date: 6/6/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 3.23/30 Tylan 10-Nitride yellow pump issues 13.39/30 Tylan 11-BPSG-LTO Up 6.92/30 Tylan 12-FGA Up Tystar Up 3.58+/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 210 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 7 06:24:45 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 07 Jun 2005 06:24:45 -0700 Subject: Diffusion Morning Report 06/07/05 Message-ID: <42A5A01D.1030301@snf.stanford.edu> Good Morning All, Looking good this morning. Pump change on nitride looks good. Everything else looks OK for now. Date: 6/7/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 3.23/30 Tylan 10-Nitride Up pump replaced 13.39/30 Tylan 11-BPSG-LTO Up 7.07/30 Tylan 12-FGA Up Tystar Up 3.58+/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 210 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From attn_henry at zipmail.com.br Tue Jun 7 19:13:38 2005 From: attn_henry at zipmail.com.br (HENRY OKOYE) Date: Tue, 7 Jun 2005 19:13:38 -0700 Subject: SCADSA Message-ID: Dear Sir, Greetings, I am Mr.Henry Okoye the Account Manager of Late Mr. Morris Thompson in Standard Trust Bank Regional Office in Victoria island, here in Lagos. However I got your contact through the International web directory.I decided to contact you by email because I feel that it is more secured and private. Recently we discovered a Dormant Account with a huge amount of Money Valued USD35,000,000.00 (Thirty Five Million Dollars only)that belongs to one of our late Customer who died in a plane crash .During our investigation and auditing in this bank, my department came across a very huge sum of money belonging to Late Mr. Morris Thompson an American great industrialist and a resident of Alaska, who unfortunately lost his life in the plane crash of Alaska Airlines Flight 261 which crashed on January 31 2000,including his wife and only daughter. You shall read more news about the crash on visiting this site which I got during my investigation; http://www.cnn.com/2000/US/02/01/alaska.airlines.list/ and http://www.nativefederation.org/history/people/mThompson.html The fund has been dormant in his account With this Bank without any claim of the funds in our custody either from his family or relation before our discovery of this development. The Banking law here stipulates that if such money remains unclaimed for Six years, it will be forfeited to the Bank treasury as an unclaimed bill.It is only a foreigner that can stand as a next of kin and It is upon this discovery that I decided to contact you to collaborate with you to pull out this dormant fund. In order to avert this negative development, I on behalf of my trusted colleagues now seek your permission to have you stand in as next of kin to Our late Customer so that the fund will be released and paid into your account as the beneficiary?s next of kin now that the bank is still expecting a next of kin or relative of the deceased ,Late Mr. Morris Thompson. In fact we could have done this deal alone but because of our position in this country as civil servants, we are not allowed to operate a foreign account and that would eventually raise an eye brow on our side during the time of transfer since we still work in this bank, this is the actual reason why we required a second party or fellow who will assist us forward claims as the next of kin and also provide either an existing bank account or to set up a new Bank a/c immediately to receive this fund, even an empty a/c can also serve for this purpose. On smooth conclusion of this transaction, you will be entitled to 40% as gratification for your assisting us, and the remaining 60% will be for me and my partners. What I want from you is for you to act as the deceased next of kin. I have in my possession, all the necessary Documents to successfully accomplish the operation. Bear in mind that this proposal is 100% risk free. Further Information will be given to you as soon as I receive your positive response. I suggest you get back to me as soon as possible stating your wish. Find in the attachment of my Family Picture, to proof who I am. I await your Urgent Responce Regrads, Mr.Henry Okoye From attn_henry at zipmail.com.br Wed Jun 8 14:21:56 2005 From: attn_henry at zipmail.com.br (Mr.Henry Okoye) Date: Wed, 8 Jun 2005 14:21:56 -0700 Subject: SCADSA Message-ID: Dear Sir, Greetings, I am Mr.Henry Okoye the Account Manager of Late Mr. Morris Thompson in Standard Trust Bank Regional Office in Victoria island, here in Lagos. However I got your contact through the International web directory.I decided to contact you by email because I feel that it is more secured and private. Recently we discovered a Dormant Account with a huge amount of Money Valued USD35,000,000.00 (Thirty Five Million Dollars only)that belongs to one of our late Customer who died in a plane crash .During our investigation and auditing in this bank, my department came across a very huge sum of money belonging to Late Mr. Morris Thompson an American great industrialist and a resident of Alaska, who unfortunately lost his life in the plane crash of Alaska Airlines Flight 261 which crashed on January 31 2000,including his wife and only daughter. You shall read more news about the crash on visiting this site which I got during my investigation; http://www.cnn.com/2000/US/02/01/alaska.airlines.list/ and http://www.nativefederation.org/history/people/mThompson.html The fund has been dormant in his account With this Bank without any claim of the funds in our custody either from his family or relation before our discovery of this development. The Banking law here stipulates that if such money remains unclaimed for Six years, it will be forfeited to the Bank treasury as an unclaimed bill.It is only a foreigner that can stand as a next of kin and It is upon this discovery that I decided to contact you to collaborate with you to pull out this dormant fund. In order to avert this negative development, I on behalf of my trusted colleagues now seek your permission to have you stand in as next of kin to Our late Customer so that the fund will be released and paid into your account as the beneficiary?s next of kin now that the bank is still expecting a next of kin or relative of the deceased ,Late Mr. Morris Thompson. In fact we could have done this deal alone but because of our position in this country as civil servants, we are not allowed to operate a foreign account and that would eventually raise an eye brow on our side during the time of transfer since we still work in this bank, this is the actual reason why we required a second party or fellow who will assist us forward claims as the next of kin and also provide either an existing bank account or to set up a new Bank a/c immediately to receive this fund, even an empty a/c can also serve for this purpose. On smooth conclusion of this transaction, you will be entitled to 40% as gratification for your assisting us, and the remaining 60% will be for me and my partners. What I want from you is for you to act as the deceased next of kin. I have in my possession, all the necessary Documents to successfully accomplish the operation. Bear in mind that this proposal is 100% risk free. Further Information will be given to you as soon as I receive your positive response. I suggest you get back to me as soon as possible stating your wish. Find in the attachment of my Family Picture, to proof who I am. I await your Urgent Responce Regrads, Mr.Henry Okoye From tberg at snf.stanford.edu Wed Jun 8 06:44:27 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 08 Jun 2005 06:44:27 -0700 Subject: Diffusion Morning Report 06/08/05 Message-ID: <42A6F63B.3020004@snf.stanford.edu> Good Morning All, Looking good this morning. Everything seems to be humming along for now. Date: 6/8/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 3.23/30 Tylan 10-Nitride Up pump replaced 15.47/30 Tylan 11-BPSG-LTO Up 7.37/30 Tylan 12-FGA Up Tystar Up 3.58+/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 210 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 9 06:46:06 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 09 Jun 2005 06:46:06 -0700 Subject: Diffusion Morning Report 06/09/05 Message-ID: <42A8481E.3000804@snf.stanford.edu> Good Morning All, Looking OK this morning. Poly had some possible dep problems-observing. Ebeam is down for cryo regen. LTO top cover replacerd after being "gloved". Everyting else looks OK for now. Date: 6/9/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly yellow possible problem 3.23/30 Tylan 10-Nitride Up 15.47/30 Tylan 11-BPSG-LTO Up 7.37/30 Tylan 12-FGA Up Tystar Up 3.58+/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 200 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 10 06:29:30 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 10 Jun 2005 06:29:30 -0700 Subject: Diffusion Morning Report 06/10/05 Message-ID: <42A995BA.4090402@snf.stanford.edu> Good Morning all, Looking good this morning. Several good runs on Poly-observing. GeH4 cylinder changed for Epi- leak check. Burn box cleaned this morning. Everything else looks OK for Now. Date: 6/10/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly yellow possible problem 3.43/30 Tylan 10-Nitride Up 15.48/30 Tylan 11-BPSG-LTO Up 7.37/30 Tylan 12-FGA Up Tystar Up 6.67/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 195 PSI changeover working well i -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 13 06:27:31 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 13 Jun 2005 06:27:31 -0700 Subject: Diffusion Morning Report 06/13/05 Message-ID: <42AD89C3.6080402@snf.stanford.edu> Good Morning All, Looking good this morning. No problems yet. Mike D and Ted will be in CPR/ first aid all morning. Date: 6/13/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 4.78/30 Tylan 10-Nitride Up 15.98/30 Tylan 11-BPSG-LTO Up 10.33/30 Tylan 12-FGA Up Tystar Up 6.67/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 170 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 14 06:33:59 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 14 Jun 2005 06:33:59 -0700 Subject: Diffusion Morning Report 06/14/05 Message-ID: <42AEDCC7.2040806@snf.stanford.edu> Good Morning All, Looking good this morning. The equipment seems to be cooperating while most of the staff is in CPR/ first aid training. No major equipment issues at this time. Stay tuned. Date: 6/14/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 4.78/30 Tylan 10-Nitride Up 17.72/30 Tylan 11-BPSG-LTO Up 11.38/30 Tylan 12-FGA Up Tystar Up 7.97/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 170 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 15 06:50:59 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 15 Jun 2005 06:50:59 -0700 Subject: Diffusion Morning Report 06/15/05 Message-ID: <42B03243.7050809@snf.stanford.edu> Good Morning All, Looking good this morning. Doing regen on ebeam cryos(planned). Epi has possible DCS flow issues-checking it out. Everything else looks OK for now. Date: 6/15/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 4.78/30 Tylan 10-Nitride Up 17.76/30 Tylan 11-BPSG-LTO Up 11.38/30 Tylan 12-FGA Up Tystar Up 7.97/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 160 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Jun 16 08:54:48 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 16 Jun 2005 08:54:48 -0700 Subject: Diffusion Morning Report 6/16/05 Message-ID: <42B1A0C8.8EE2B510@snf.stanford.edu> Good Morning All, Ted is out till Monday 6/27. I am coming up to speed slowely after my 2 weeks off. The Diffusion equipment is looking good this morning. Good thing as I have many emails to go through. Any questions or concerns on the Diffusion process equipment, please contact myself at 4 7425. Diffusion Date: 6/16/2005 Tube Name/Number Status Comments THICKNESS/Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 4.78/30 Tylan 10-Nitride Up 19.66/30 Tylan 11-BPSG-LTO Up 13.08/30 Tylan 12-FGA Up Tystar Up Doped Poly GONE TEOS Up Tylan 16 N/A Thermco 1 UP Thermco 2 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 160 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Jun 20 07:57:28 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 20 Jun 2005 07:57:28 -0700 Subject: Diffusion morning repost Message-ID: <42B6D957.C285498F@snf.stanford.edu> Good Morning all, The morning started off with a couple of furnace issues, but all are doing good now. Ted will be out all week. I will try to cover for him. I hope everyone has a pleasant day. Diffusion Date: 6/16/2005 Tube Name/Number status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Tylan 8-SiGe Up 3.36/30 Tylan 9-Poly Up 6.21/30 Tylan 10-Nitride Up 21.83/30 Tylan 11-BPSG-LTO Up 13.08/30 Tylan 12-FGA Up Tystar Up 7.77/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 Up SiH4 for furnaces B on line 160 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Jun 20 18:38:24 2005 From: nanotech at nsti.org (NSTI) Date: Mon, 20 Jun 2005 18:38:24 -0700 Subject: Nanotech 2005 CDROM Now Available Message-ID: An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Jun 21 07:39:10 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 21 Jun 2005 07:39:10 -0700 Subject: Diffusion Morning report Message-ID: <42B8268E.5555C492@snf.stanford.edu> Morning all, Tube 6 (POCL#) has a small door area leak that we will check out this morning. Everything else is looking good. Diffusion Date: 6/21/2005 Tube Name/Number status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Down Leaking at end cap Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.36/30 Tylan 9-Poly Up 6.53/30 Tylan 10-Nitride Up 21.6/30 Tylan 11-BPSG-LTO Up 13.08/30 Tylan 12-FGA Up Tystar Up 7.97/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 Up SiH4 for furnaces B on line 140 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Jun 22 09:48:51 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 22 Jun 2005 09:48:51 -0700 Subject: Diffusion morning report Message-ID: <42B99673.30948F4F@snf.stanford.edu> Good Morning All, The burnbox pressure was a little high this morning so we cleaned it before the morning rush for LPCVD began. Everything looking good now. Diffusion Date: 6/22/2005 Tube Name/Number status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Tylan 8-SiGe Up 3.36/30 Tylan 9-Poly Up 6.53/30 Tylan 10-Nitride Up 22.22/30 Tylan 11-BPSG-LTO Up 13.08/30 Tylan 12-FGA Up Tystar Up 7.97/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 Up SiH4 for furnaces B on line 130 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Jun 23 08:01:09 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 23 Jun 2005 08:01:09 -0700 Subject: Diffusion Morning Report Message-ID: <42BACEB4.9C5B5C95@snf.stanford.edu> Morning All, Everything looking good this morning. Diffusion Date: 6/22/2005 Tube Name/Number status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.36/30 Tylan 9-Poly Up 6.7/30 Tylan 10-Nitride Up 25.3/30 Tylan 11-BPSG-LTO Up 18.43/30 Tylan 12-FGA Up Tystar Up 7.97/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 Up SiH4 for furnaces B on line 130 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Jun 24 07:33:06 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 24 Jun 2005 07:33:06 -0700 Subject: Diffusion Morning Report Message-ID: <42BC19A2.B8659F20@snf.stanford.edu> Good Morning, Things are looking real good this morning. Nitride is moving up for a clean next week and LTO is right behind it. Have a great weekend. Diffusion Date: 6/24/2005 Tube Name/Number status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Tylan 8-SiGe Up 3.36/30 Tylan 9-Poly Up 7.3/30 Tylan 10-Nitride Up 25.3/30 Tylan 11-BPSG-LTO Up 18.43/30 Tylan 12-FGA Up Tystar Up 7.97/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO Up Up GAAS 22 UP GAAS 23 Up SiH4 for furnaces B on line 125 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 27 07:35:55 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 27 Jun 2005 07:35:55 -0700 Subject: Diffusion Morning Report 06/27/05 Message-ID: <42C00ECB.7090504@snf.stanford.edu> Good Morning All, Looking good this morning. Everything seems to be going along fine for now. Nitride is at 25 microns and will probably be going down . later this week depending on use. Date: 6/27/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 4.12/30 Tylan 9-Poly Up 7.3/30 Tylan 10-Nitride Up 25.6/30 Tylan 11-BPSG-LTO Up 18.73/30 Tylan 12-FGA Up Tystar Up 7.97/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 120 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 28 06:24:16 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 28 Jun 2005 06:24:16 -0700 Subject: Difffusion Morning Report 06/28/05 Message-ID: <42C14F80.2020107@snf.stanford.edu> Good Morning All, Looking Ok this morning. Ebeam is down cryo1 warm-regening. Had issues with Nitride and LTO yesterday-observing. Everything else looks OK for now. Date: 6/28/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 4.12/30 Tylan 9-Poly Up 7.3/30 Tylan 10-Nitride Up 25.6/30 Tylan 11-BPSG-LTO Up 18.73/30 Tylan 12-FGA Up Tystar Up 8.47/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 120 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 29 06:25:24 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 29 Jun 2005 06:25:24 -0700 Subject: Diffusion Morning Report 06/29/05 Message-ID: <42C2A144.7030505@snf.stanford.edu> Good Morning All, Looking pretty good this morning. ebeam has some issue with writing-will investigate. Nitride and LTO under observation. Everything else looks OK for now. Date: 6/29/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 4.12/30 Tylan 9-Poly Up 7.3/30 Tylan 10-Nitride Up 25.7/30 Tylan 11-BPSG-LTO Up 18.73/30 Tylan 12-FGA Up Tystar Up 8.64/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 90 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 30 06:28:33 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 30 Jun 2005 06:28:33 -0700 Subject: Diffusion Morning Report 06/30/05 Message-ID: <42C3F381.9090309@snf.stanford.edu> Good Morning All, Looking good this morning. Ebeam is back up. Nitride has several unrecorded runs. LTO went up by10 microns yesterday so both are close to change. Everything else looks OK for now. Date: 6/30/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 4.12/30 Tylan 9-Poly Up 7.3/30 Tylan 10-Nitride Up 25.7/30 Tylan 11-BPSG-LTO Up 25.78/30 Tylan 12-FGA Up Tystar Up 8.64/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 75 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: