From tberg at snf.stanford.edu Tue Mar 1 06:33:52 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 01 Mar 2005 06:33:52 -0800 Subject: Diffusion Morning Report 03/01/05 Message-ID: <42247D50.3060107@snf.stanford.edu> Good Morning All, Looking Good this morning. Tystar is over scheduled clean thickness and is going down tomorrow morning for pull and clean. TEOS2 and Thermco poly testing. Everything else looks OK for now. Date: 3/1/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 1.41/30 Tylan 9-Poly Up 24.4/30 Tylan 10-Nitride Up 22.85/30 Tylan 11-BPSG-LTO Up 2.46/30 Tylan 12-FGA Up Tystar yellow 35.01/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 150 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 2 06:53:11 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 02 Mar 2005 06:53:11 -0800 Subject: Diffusion Morning Report 03/02/05 Message-ID: <4225D357.6080505@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Tylan 1 has a problem with N2 leak looking into it. Tystar is down for pull and clean poly and Nitride are coming up in thickness. TEOS1 is down for ampule change. TEOS 2 and Thermco poly testing. Everything else looks OK for now. Date: 3/2/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 down N2 leak alarm Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 1.41/30 Tylan 9-Poly Up 24.4/30 Tylan 10-Nitride Up 22.85/30 Tylan 11-BPSG-LTO Up 2.846/30 Tylan 12-FGA Up Tystar down Pull and clean 0/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 120 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Mar 2 22:12:04 2005 From: nanotech at nsti.org (Nanotech Ventures 2005) Date: Wed, 2 Mar 2005 22:12:04 -0800 Subject: Emerging Technology Company Showcase Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 3 06:50:17 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 03 Mar 2005 06:50:17 -0800 Subject: Diffusion Morning Report 03/03/05 Message-ID: <42272429.60505@snf.stanford.edu> Good Morning All, Looking good this morning. Tystar is back up after speedy tube change -thanks Mike and Maurice. Epi is going down today for HCL cylinder change. Everything else looks OK for now. Date: 3/3/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.14/30 Tylan 9-Poly Up 24.55/30 Tylan 10-Nitride Up 23.29/30 Tylan 11-BPSG-LTO Up 2.846/30 Tylan 12-FGA Up Tystar Up Pull and clean completed .89/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 120 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 4 06:28:29 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 04 Mar 2005 06:28:29 -0800 Subject: Diffusion morning Report 03/04/05 Message-ID: <4228708D.8030609@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Burn box cleaned this morning. Poly and Nitride getting close to change. Epi HCL changed yesterday. Everything else looks OK for now. Date: 3/4/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.14/30 Tylan 9-Poly Up 24.65/30 Tylan 10-Nitride Up 23.69/30 Tylan 11-BPSG-LTO Up 4.3/30 Tylan 12-FGA Up Tystar Up .89/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 50 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 7 07:11:31 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 07 Mar 2005 07:11:31 -0800 Subject: Diffusion Morning Report 03/07/05 Message-ID: <422C6F23.70605@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Had a problem with epi- door interlock ok Now. Nitride is down for NH3 cylinder change. TEOS2 and Thermco poly testing. Everything else looks OK for now. Date: 3/7/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.14/30 Tylan 9-Poly Up 24.8/30 Tylan 10-Nitride Down NH3 change 23.69/30 Tylan 11-BPSG-LTO Up 4.3/30 Tylan 12-FGA Up Tystar Up 5.137/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 8 06:36:01 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 08 Mar 2005 06:36:01 -0800 Subject: Diffusion Morning Report 03/08/05 Message-ID: <422DB851.50307@snf.stanford.edu> Good Morning all, Looking OK this morning. Nitride is down for NH3 cylinder change. Changed throttle valve on TEOS yesterday. Nitride and Poly are about 5 microns from pull and clean. Everything else looks OK for now. Date: 3/8/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.14/30 Tylan 9-Poly Up 24.8/30 Tylan 10-Nitride Down NH3 cylinder change 23.69/30 Tylan 11-BPSG-LTO Up 5.14/30 Tylan 12-FGA Up Tystar Up 5.137/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 9 06:49:24 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 09 Mar 2005 06:49:24 -0800 Subject: Diffusion Morning Report 03/09/05 Message-ID: <422F0CF4.9030404@snf.stanford.edu> Good Morning All, Looking Good this morning. Nitride is Back up after cylinder change. Tylan 1 has N2 leak issue again- looking into it. Epi had Dopant flow issues- checking it out. Everything else looks ok for now. Date: 3/9/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up N2 leak alarm Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.14/30 Tylan 9-Poly Up 24.8/30 Tylan 10-Nitride Up Good after cylinder change 24.2/30 Tylan 11-BPSG-LTO Up 5.14/30 Tylan 12-FGA Up Tystar Up 5.137/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 10 06:38:50 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 10 Mar 2005 06:38:50 -0800 Subject: Diffusion Morning Report 03/10/05 Message-ID: <42305BFA.4030400@snf.stanford.edu> Good Morning All, Looking good this morning. SiGe has temp Stabilization issues -looking into it. Germane for Epi is low at 20 Psi-maybe we should change today? Poly is at 27+ and will probably go down next week for pull and clean. Ebeam back in high vac. Date: 3/10/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow Temp Stab Problem 2.58/30 Tylan 9-Poly Up 27.35/30 Tylan 10-Nitride Up 24.2/30 Tylan 11-BPSG-LTO Up 5.58/30 Tylan 12-FGA Up Tystar Up 5.137/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 11 06:31:32 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 11 Mar 2005 06:31:32 -0800 Subject: Diffusion Morning Report 03/11/05 Message-ID: <4231ABC4.7070704@snf.stanford.edu> Good Morning all, Looking good this morning . LTO has a pumping problem-looking into it. SiGe is doing temp cal-very slowly. Ebeam has a beam again. Hitachi will be here Monday to make the system wonderful. Burn box cleaned this morning. Everything else looks OK for now. Date: 3/11/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow Temp Stab Problem 2.58/30 Tylan 9-Poly Up 27.72/30 Tylan 10-Nitride Up 24.2/30 Tylan 11-BPSG-LTO Down Won't pump down 10.68/30 Tylan 12-FGA Up Tystar Up 5.23/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 14 07:24:26 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 14 Mar 2005 07:24:26 -0800 Subject: Diffusion Morning Report 03/14/05 Message-ID: <4235ACAA.6000602@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Poly has 37+ microns and is going down tomorrow morning for pull and clean. SiGe is doing temp cal-could take a while. Hitachi will be here today to work on ebeam. Everythiung else looks OK for now. Date: 3/14/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow Temp Stab Problem 2.58/30 Tylan 9-Poly Up 37.15/30 Tylan 10-Nitride Up 25.2/30 Tylan 11-BPSG-LTO Up 10.68/30 Tylan 12-FGA Up Tystar Up 5.23/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 15 07:02:05 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 15 Mar 2005 07:02:05 -0800 Subject: Diffusion Morning Report 03/15/05 Message-ID: <4236F8ED.1050603@snf.stanford.edu> Good Morning All. Things are looking good this morning. Poly is down for scheduled pull and clean. SiGe is back up after temp cal. Hitachi factory support is her and working on Ebeam. Everything else looks OK for now. Date: 3/15/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up Temp cal completed 2.58/30 Tylan 9-Poly down Pull and Clean 0/30 Tylan 10-Nitride Up 25.2/30 Tylan 11-BPSG-LTO Up 8.35/30 Tylan 12-FGA Up Tystar Up 5.23/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 16 06:20:47 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 16 Mar 2005 06:20:47 -0800 Subject: Diffusion Morning report 03/16/05 Message-ID: <423840BF.30602@snf.stanford.edu> Good Morning All, Looking good this morning. Poly is back up after pull and clean. Hitachi is here and doing annual PM and addressing ongoing issues on Ebeam. Everything else looks OK for now. Date: 3/16/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up Pull and Clean-completed .18/30 Tylan 10-Nitride Up 25.2/30 Tylan 11-BPSG-LTO Up 8.74/30 Tylan 12-FGA Up Tystar Up 5.23/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 17 07:15:37 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 17 Mar 2005 07:15:37 -0800 Subject: Diffusion Morning Report 03/17/05 Message-ID: <42399F19.1010103@snf.stanford.edu> Good Morning and Happy St Patrick's Day to all, Looking good this morning. Hitachi has been here since Monday working on the Ebeam tool-making it wonderful and it is going well. TYlan 2 had a TC error-corrected. Everything else looks OK for now. Date: 3/17/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up 1.18/30 Tylan 10-Nitride Up 25.2/30 Tylan 11-BPSG-LTO Up 8.74/30 Tylan 12-FGA Up Tystar Up 5.23/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 17 07:22:54 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 17 Mar 2005 07:22:54 -0800 Subject: diffusion Morning Report 03/17/05 Message-ID: <4239A0CE.3060907@snf.stanford.edu> Good Morning and Happy St Patrick's Day to all, Looking good this morning. Hitachi has been here since Monday working on the Ebeam tool-making it wonderful and it is going well. TYlan 2 had a TC error-corrected. Everything else looks OK for now. Date: 3/17/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up 1.18/30 Tylan 10-Nitride Up 25.2/30 Tylan 11-BPSG-LTO Up 8.74/30 Tylan 12-FGA Up Tystar Up 5.23/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 18 06:20:34 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 18 Mar 2005 06:20:34 -0800 Subject: Diffusion Morning Report 03/18/05 Message-ID: <423AE3B2.70603@snf.stanford.edu> Good Morning All, Looking Good this morning. Burn box cleaned this morning. Hitachi is back in High vac will try and find beam today. Everything else is looking OK for now. Date: 3/18/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up 1.99/30 Tylan 10-Nitride Up 25.8/30 Tylan 11-BPSG-LTO Up 8.74/30 Tylan 12-FGA Up Tystar Up 5.23/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this Morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From customer_id0327 at .regions.com Sat Mar 19 08:38:33 2005 From: customer_id0327 at .regions.com (RegionsNET Customer Service) Date: Sat, 19 Mar 2005 08:38:33 -0800 Subject: CUSTOMER NOTICE: YOUR REGIONS BANK ACCOUNT Message-ID: <200503191638.j2JGcXUS032386@mc-olimp.com> An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Mar 21 07:17:58 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 21 Mar 2005 07:17:58 -0800 Subject: Diffusion Morning Report Message-ID: <423EE5A6.709AA27F@snf.stanford.edu> Diffusion Date: 3/21/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up 1.99/30 Tylan 10-Nitride Up 26.3/30 Tylan 11-BPSG-LTOUp 1.35/30 Tylan 12-FGA Up Tystar Up 7.9/30 Doped Poly GONE TEOS Up Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From aw-confirm at paypal.com Mon Mar 21 09:17:27 2005 From: aw-confirm at paypal.com (PayPal) Date: Mon, 21 Mar 2005 09:17:27 -0800 Subject: Your Account Will Be Suspended ; Checking Message-ID: <200503211717.j2LHHRMw007070@mc-olimp.com> An HTML attachment was scrubbed... URL: From aw-confirm at paypal.com Mon Mar 21 11:08:54 2005 From: aw-confirm at paypal.com (PayPal) Date: Mon, 21 Mar 2005 14:08:54 -0500 Subject: Your Account Will Be Suspended ; Checking Message-ID: An HTML attachment was scrubbed... URL: From aw-confirm at paypal.com Mon Mar 21 11:08:54 2005 From: aw-confirm at paypal.com (PayPal) Date: Mon, 21 Mar 2005 14:08:54 -0500 Subject: Your Account Will Be Suspended ; Checking Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 22 06:49:35 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 22 Mar 2005 06:49:35 -0800 Subject: Diffusion Morning Report 03/22/05 Message-ID: <4240307F.7070003@snf.stanford.edu> Good Morning All, Looking pretty good today. Hitachi is still working on ebeam. Everythting else looks ok for now. Date: 3//2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up 2.17/30 Tylan 10-Nitride Up 26.4/30 Tylan 11-BPSG-LTO Up 10.14/30 Tylan 12-FGA Up Tystar Up 7.88/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 23 06:37:52 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 23 Mar 2005 06:37:52 -0800 Subject: Diffusion Morning Report03/23/05 Message-ID: <42417F40.4030505@snf.stanford.edu> Good Morning All, Looking good this morning. Hitachi FS is writng wafers for final tsting today- most issues have been addressed-stay tuned, Everything else is looking good for now. Date: 3/23/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up 2.47/30 Tylan 10-Nitride Up 26.4/30 Tylan 11-BPSG-LTO Up 10.19/30 Tylan 12-FGA Up Tystar Up 7.88/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 24 07:36:55 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 24 Mar 2005 07:36:55 -0800 Subject: Diffusion Morning Report 03/24/05 Message-ID: <4242DE97.2090409@snf.stanford.edu> Good Morning All, Looking good this morning. Tylan 1 had an N2 leak error -looking into it. Hitachi is moving along. Everything else looks ok for now. Date: 3/24/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow N2 leak error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 2.58/30 Tylan 9-Poly Up 2.62/30 Tylan 10-Nitride Up 26.4/30 Tylan 11-BPSG-LTO Up 11.28/30 Tylan 12-FGA Up Tystar Up 7.88/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 630 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 25 06:36:16 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 25 Mar 2005 06:36:16 -0800 Subject: Diffusion Morning Report 03/25/05 Message-ID: <424421E0.8090604@snf.stanford.edu> Good Motrning All, Looking good this morning. Burn box cleaned this morning. Hitachi FS will finish up today and ebam is looking good. Epi HCL cylinder changed yesterday - leak check looking good. Everything else looks ok for now. Date: 3/25/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow N2 leak error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 2.77/30 Tylan 10-Nitride Up 26.4/30 Tylan 11-BPSG-LTO Up 13.68/30 Tylan 12-FGA Up Tystar Up 7.98/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 615 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 28 06:33:45 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 28 Mar 2005 06:33:45 -0800 Subject: Diffusion Morning Report 03/28/05 Message-ID: <424815C9.80103@snf.stanford.edu> Good Morning All, Looking Good this morning. Mike replaced epi lamps. Hitachi has finished work on Ebeam and it looks great. Everything else looks ok for now. Date: 3/28/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow N2 leak error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 2.92/30 Tylan 10-Nitride Up 26.5/30 Tylan 11-BPSG-LTO Up 15.222/30 Tylan 12-FGA Up Tystar Up 7.98/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 615 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 29 08:07:58 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 29 Mar 2005 08:07:58 -0800 Subject: Diffusion Morning Report 03/29/05 Message-ID: <42497D5E.8010707@snf.stanford.edu> Good Morning All, Looking good this morning. Mike changed oil and filter for the nitride pump. Hitachi is back to green. Everything else looks ok for now. Date: 3/29/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow N2 leak error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 3.54/30 Tylan 10-Nitride Up 26.5/30 Tylan 11-BPSG-LTO Up 16.222/30 Tylan 12-FGA Up Tystar Up 8.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 605 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Mar 29 19:35:46 2005 From: nanotech at nsti.org (Nanotech 2005) Date: Tue, 29 Mar 2005 19:35:46 -0800 Subject: Nanotech Full Program, Expo, Workshops & Ventures Message-ID: Nanotech 2005 May 8-12, Anaheim, California http://www.nsti.org/Nanotech2005 The 8th annual NSTI Nanotech 2005, the premier nanotechnology conference and trade show in the U.S., will take place May 8-12, 2005 at the Anaheim Marriott, California. The largest and most comprehensive nanotechnology event in the U.S., Nanotech 2005 will host over 2500 attendees, 600 business & research presentations and 130 exhibiting companies. Over 50 early stage nanotech companies will be presenting within the Nanotech 2005 Early Stage Company and Investment Review. The Nanotech 2005 Scientific Program is the most respected nano event in the U.S., with endorsements from top U.S. and European societies, research agencies and fortune 500 companies. This year?s program is schedule with special industry focused symposia. These include sessions on the Health Care, Biotechnology, Materials, Surface sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. Special symposia this year include: Nano Industrial Impact Workshop ? Sunday May 8 One-Day Intensive Program to educate participants in the current state of the art in a range of nanotechnologies and impacted industries. All courses are presented by leading experts in their respective fields. National Cancer Institute Symposium ? Tuesday May 10 NSTI is proud to collaborate with the National Cancer Institute (NCI) and Northeastern University in presenting a Special Symposium on Nanotechnology for Cancer Prevention, Diagnosis and Treatment. Nanotech Ventures Emerging Company Review ? May 9 - 11 Join the Nanotech Ventures community in participating in the world's largest nanotechnology venture forum. 50 Early Stage Companies Presenting in most every high-tech industrial sector. --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6199311S at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 30 06:31:23 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 30 Mar 2005 06:31:23 -0800 Subject: Diffusion Morning Report 03/30/05 Message-ID: <424AB83B.8040804@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS2 changed to yellow as it moves into main stream. Everything else looks OK for now. Date: 3/30/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 4.54/30 Tylan 10-Nitride Up 26.9/30 Tylan 11-BPSG-LTO Up 17.46/30 Tylan 12-FGA Up Tystar Up 9.77/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 585 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 31 06:44:19 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 31 Mar 2005 06:44:19 -0800 Subject: Diffusion Morning Report 03/31/05 Message-ID: <424C0CC3.4080907@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride is at 28+ microns and will be going down on Monday morning for pull and clean. TEOS2 changed to yellow to get ready for general use. Everything else is OK for now. Date: 3/31/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 4.05/30 Tylan 10-Nitride Up 28.7/30 Tylan 11-BPSG-LTO Up 18.9/30 Tylan 12-FGA Up Tystar Up 9.77/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: