Diffusion Morning Report 03/01/05

Ted Berg tberg at snf.stanford.edu
Tue Mar 1 06:33:52 PST 2005


Good Morning All,
    Looking Good this morning.  Tystar is over scheduled clean thickness 
and is going down tomorrow morning for pull and clean. TEOS2
and Thermco poly testing. Everything else looks OK for now.
  	Date: 	3/1/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	1.41/30
Tylan 9-Poly 	Up 	  	24.4/30
Tylan 10-Nitride 	Up 	  	22.85/30
Tylan 11-BPSG-LTO 	Up 	  	2.46/30
Tylan 12-FGA 	Up 	  	 
Tystar 	yellow 	  	35.01/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well  	A on line 150 PSI


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