Diffusion Morning Report 03/02/05

Ted Berg tberg at snf.stanford.edu
Wed Mar 2 06:53:11 PST 2005

Good Morning All,
    Looking pretty good this morning.  Tylan 1 has a problem with N2 
leak looking into it.  Tystar is down for pull and clean poly and 
Nitride are coming up
in thickness. TEOS1 is down for ampule change.  TEOS 2 and Thermco poly 
testing.  Everything else looks OK for now. 

  	Date: 	3/2/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	down 	N2 leak alarm
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	1.41/30
Tylan 9-Poly 	Up 	  	24.4/30
Tylan 10-Nitride 	Up 	  	22.85/30
Tylan 11-BPSG-LTO 	Up 	  	2.846/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	Pull and clean 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well  	A on line 120 PSI

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