Diffusion Morning Report 03/08/05

Ted Berg tberg at snf.stanford.edu
Tue Mar 8 06:36:01 PST 2005

Good Morning all,
    Looking OK this morning.  Nitride is down for NH3 cylinder change. 
Changed throttle valve on TEOS yesterday.  Nitride and Poly
are about 5 microns from pull and clean.  Everything else looks OK for now.

  	Date: 	3/8/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	2.14/30
Tylan 9-Poly 	Up 	  	24.8/30
Tylan 10-Nitride 	Down 	NH3 cylinder change
Tylan 11-BPSG-LTO 	Up 	  	5.14/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	5.137/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well  	B on line 700 PSI

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