Diffusion Morning Report 03/09/05

Ted Berg tberg at snf.stanford.edu
Wed Mar 9 06:49:24 PST 2005


Good Morning All,
    Looking Good this morning. Nitride is Back up after cylinder 
change.  Tylan 1 has N2 leak issue again- looking into it.  Epi had 
Dopant flow issues-
checking it out.  Everything else looks ok for now.

  	Date: 	3/9/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	 N2 leak alarm
	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	2.14/30
Tylan 9-Poly 	Up 	  	24.8/30
Tylan 10-Nitride 	Up 	Good after cylinder change 	24.2/30
Tylan 11-BPSG-LTO 	Up 	  	5.14/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	5.137/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well  	B on line 700 PSI


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20050309/5e2398f6/attachment.html>


More information about the diffusion mailing list