Diffusion Morning Report 03/14/05

Ted Berg tberg at snf.stanford.edu
Mon Mar 14 07:24:26 PST 2005


Good Morning All,
    Looking pretty good this morning. Poly has 37+ microns and is going 
down tomorrow morning for pull and clean.  SiGe is doing
temp cal-could take a while. Hitachi will be here today to work on 
ebeam.  Everythiung else looks OK for now.

  	Date: 	3/14/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	yellow 	Temp Stab Problem 	2.58/30
Tylan 9-Poly 	Up 	  	37.15/30
Tylan 10-Nitride 	Up 	  	25.2/30
Tylan 11-BPSG-LTO 	Up 	  	10.68/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	5.23/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well  	B on line 680 PSI


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