Diffusion Morning Report 03/15/05

Ted Berg tberg at snf.stanford.edu
Tue Mar 15 07:02:05 PST 2005


Good Morning All.
    Things are looking good this morning.  Poly is down for scheduled 
pull and clean. SiGe is back up after temp cal.  Hitachi factory support is
her and working on Ebeam.  Everything else looks OK for now.

  	Date: 	3/15/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	Temp cal completed 	2.58/30
Tylan 9-Poly 	down 	Pull and Clean 	0/30
Tylan 10-Nitride 	Up 	  	25.2/30
Tylan 11-BPSG-LTO 	Up 	  	8.35/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	5.23/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well  	B on line 660 PSI


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