Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Mon Mar 21 07:17:58 PST 2005


Diffusion                   Date:                        3/21/2005
Tube Name/Number Status
Comments                            THICKNESS-Change at
Tylan 1                     Up
Tylan 2                     Up
Tylan 3                     Up
Tylan 4                     Up
Tylan 5-BBr3            Up
Tylan 6-POCl3          Up
Tylan 7-TEOS2         down                          Qual testing
Tylan 8-SiGe
Up
2.58/30
Tylan 9-Poly
Up
1.99/30
Tylan 10-Nitride
Up
26.3/30
Tylan
11-BPSG-LTOUp
1.35/30
Tylan 12-FGA           Up
Tystar
Up
7.9/30
Doped Poly               GONE
TEOS                       Up
Tylan 16                    N/A
Yhermco 1                UP
Thermco 1                UP
Thermco Poly           Yellow                           testing doped
Thermco Nitride        Down                            Waiting

Burn Box Up

ZYGO                      Up

GAAS 22                 UP
GAAS 23                 UP

SiH4 for furnaces                                      Auto changeover
working well  B on line 640 PSI


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