From tberg at snf.stanford.edu Mon May 2 07:13:56 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 02 May 2005 07:13:56 -0700 Subject: Diffusion Morning Report 05/02/05 Message-ID: <427635A4.60406@snf.stanford.edu> Good Morning All, Looking good this morning. Had a problem over the weekend where someone got TYCOM into continuous update mode on one tube. It is OK now. LTO had a N2 zero problem-adjusted. Everything else looks ok for now. Date: 5/2/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up .86/30 Tylan 10-Nitride yellow Observing particles 6.75/30 Tylan 11-BPSG-LTO Up 10.23/30 Tylan 12-FGA Up Tystar Up 23.46/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 460 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 3 06:24:10 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 03 May 2005 06:24:10 -0700 Subject: Diffusion Morning Report 05/03/05 Message-ID: <42777B7A.8010804@snf.stanford.edu> Good Morning All, Looking good this morning. Still observing Nitride. Zygo is having problems-looking into it.Tystar is getting close to pull and clean. Everything else is looking OK for now. Date: 5/3/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 1.17/30 Tylan 10-Nitride yellow Observing particles 6.75/30 Tylan 11-BPSG-LTO Up 10.26/30 Tylan 12-FGA Up Tystar Up 23.91/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO Down Light Problems GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 445 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 4 06:36:49 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 04 May 2005 06:36:49 -0700 Subject: Diffusion Morning Report 05/04/05 Message-ID: <4278CFF1.7060605@snf.stanford.edu> Good Morning All, Looking OK this morning. Observing Nitride-leak checked yesterday-looked good. Ebeam has high vacuum-regening. Fighting with HCL for EPI. Everything else looks OK for now. Date: 5/4/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 1.32/30 Tylan 10-Nitride yellow Observing particles 6.75/30 Tylan 11-BPSG-LTO Up 10.36/30 Tylan 12-FGA Up Tystar Up 23.91/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 445 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 5 06:47:32 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 05 May 2005 06:47:32 -0700 Subject: Diffusion Morning Report 05/05/05 Message-ID: <427A23F4.3080308@snf.stanford.edu> Good Morning All, Happy Cinco De Mayo. Looking pretty good this morning. Epi HCl and n-dope having a bit of a problem with flows looking into it. Ebeam is back up after regen. Lptubes not used too much yesterday. Everything else looking OK for now. Date: 5/5/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 1.32/30 Tylan 10-Nitride yellow Observing particles 6.75/30 Tylan 11-BPSG-LTO Up 10.36/30 Tylan 12-FGA Up Tystar Up 23.91/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 445 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri May 6 08:37:04 2005 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 06 May 2005 08:37:04 -0700 Subject: Diffusion Morning Report Message-ID: <427B8F20.49681C2@snf.stanford.edu> Morning All, Ted is out today. The burnbox for LPCVD was cleaned and exhaust back pressure at pumps checked, and they were good. everything else is looking good this morning. Diffusion Date: 5/6/2005 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 1.86/30 Tylan 10-Nitride Up Observing particles 6.75/30 Tylan 11-BPSG-LTO Up 10.77/30 Tylan 12-FGA Up Tystar Up 24.08 Doped Poly GONE TEOS Up Tylan 16 N/A Thermco 1 UP Thermco 1 UP Thermco Poly Yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 445 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 9 06:40:27 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 09 May 2005 06:40:27 -0700 Subject: Diffusion Morning Report 05/09/05 Message-ID: <427F684B.7030108@snf.stanford.edu> Good Morning All, Looking OK this morning. Ebeam had a vacuum issue on cryo 1 regening. TYstar close to pull and clean several runs not logged. Everything else looks ok for now. Date: 5/9/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 1.86/30 Tylan 10-Nitride yellow Observing particles 8.5/30 Tylan 11-BPSG-LTO Up 15.6/30 Tylan 12-FGA Up Tystar Up 24.08/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 430 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 10 06:35:45 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 10 May 2005 06:35:45 -0700 Subject: Diffusion Morning Report 05/10/05 Message-ID: <4280B8B1.5050604@snf.stanford.edu> Good Morning All, Looking good this morning. Ebeam is ok this morning. Nitride under observation. Tystar getting close to pull and clean. Everything else looks OK for now. Date: 5/10/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 1.86/30 Tylan 10-Nitride yellow Observing particles 9.35/30 Tylan 11-BPSG-LTO Up 15.86/30 Tylan 12-FGA Up Tystar Up 24.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 415 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 11 06:24:02 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 11 May 2005 06:24:02 -0700 Subject: Diffusion Morning report 05/11/05 Message-ID: <42820772.1030107@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Had to do an interim clean on burn box-pressure was high. Everything else looks ok for now. Date: 5/11/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 5.88/30 Tylan 10-Nitride yellow Observing particles 9.4/30 Tylan 11-BPSG-LTO Up 15.96/30 Tylan 12-FGA Up Tystar Up 24.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 12 06:34:07 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 12 May 2005 06:34:07 -0700 Subject: Diffusion Morning Report 05/12/05 Message-ID: <42835B4F.6090609@snf.stanford.edu> Good Morning All, Looking good this morning . Ebeam still in Hi vac. Nitride still under observation for particles. Working on HCL and HBr gas panels Everything else looks OK for now. Date: 5/12/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 6.00/30 Tylan 10-Nitride yellow Observing particles 9.95/30 Tylan 11-BPSG-LTO Up 15.96/30 Tylan 12-FGA Up Tystar Up 24.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 13 06:49:34 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 13 May 2005 06:49:34 -0700 Subject: Diffusion morning Report 05/13/05 Message-ID: <4284B06E.7000103@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride still under observation. Burn box cleaned this morning. Looks like N-dope problem is resolved for Epi. Everything else looks OK for now. Date: 5/13/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 6.00/30 Tylan 10-Nitride yellow Observing particles 10.7/30 Tylan 11-BPSG-LTO Up 16.06/30 Tylan 12-FGA Up Tystar Up 24.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaning this morning ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 16 06:40:19 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 16 May 2005 06:40:19 -0700 Subject: Diffusion Morning Report 05/16/05 Message-ID: <4288A2C3.3070202@snf.stanford.edu> Good Morning All, Looking OK this morning. Nitride still under observation. Ebeam is down for a bad PG2. SiGe had N2/Ar leak alarm-zero drift-looking into it. Everything else looks OK for now. Date: 5/16/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe yellow N2/Ar zero drift 3.12/30 Tylan 9-Poly Up 6.34/30 Tylan 10-Nitride yellow Observing particles 10.7/30 Tylan 11-BPSG-LTO Up 16.09/30 Tylan 12-FGA Up Tystar Up 24.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 17 06:26:54 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 17 May 2005 06:26:54 -0700 Subject: Diffusion Morning Report 05/17/05 Message-ID: <4289F11E.5000000@snf.stanford.edu> Good Morning All, Looking OK this morning. Nitride under observation. Ebeam is still having cryo issues. Everything else looks OK for now. Date: 5/17/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Qual testing Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 6.34/30 Tylan 10-Nitride yellow Observing particles 11.03/30 Tylan 11-BPSG-LTO Up 16.09/30 Tylan 12-FGA Up Tystar Up 24.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From awconfirm at alias.omegaworks.com Tue May 17 17:49:57 2005 From: awconfirm at alias.omegaworks.com (eBay.com) Date: Wed, 18 May 2005 02:49:57 +0200 (CEST) Subject: Your eBay account could be suspended! Message-ID: <200505180049.j4I0nv1Y023593@www.extra-intra.net> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 18 06:31:26 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 18 May 2005 06:31:26 -0700 Subject: Diffusion Morning Report05/18/05 Message-ID: <428B43AE.3090601@snf.stanford.edu> Good Morning All, Looking pretty good this morning. A couple of furnaces have display problems-checking it out. Tylan 2 source controller is not cooling. Ebeam is in regen. HBr gas cab testing today-gas should be on after that. Everything else is OK fore now. Date: 5/18/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow source controller issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 6.69/30 Tylan 10-Nitride yellow Observing particles 11.66/30 Tylan 11-BPSG-LTO Up 17.01/30 Tylan 12-FGA Up Tystar Up 24.78/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 19 06:51:10 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 19 May 2005 06:51:10 -0700 Subject: Diffusion Morning Report 05/19/05 Message-ID: <428C99CE.2090803@snf.stanford.edu> Good Morning All, Looking ok this morning. Poly is down -broken tube-replacing. Nitride is still under observation for particles. Ebeam still in High vac. source controller for Tylan 2 is not cooling-investigating. Everything else is OK for now. Date: 5/19/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow source controller issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Down tube broken 6.69/30 Tylan 10-Nitride yellow Observing particles 11.86/30 Tylan 11-BPSG-LTO Up 18.5/30 Tylan 12-FGA Up Tystar Up 24.78/30+ Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 20 08:03:16 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 20 May 2005 08:03:16 -0700 Subject: Diffusion Morning Report 05/20/05 Message-ID: <428DFC34.8070008@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride particles seem to be good for now. Tylan 2 source controller is still a problem. Poly is back up after tube change. Ebeam is still in High vac. Everything else looks OK for now. Date: 5/20/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow source controller issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up tube replaced & tested .22/30 Tylan 10-Nitride yellow Particles look good 12.06/30 Tylan 11-BPSG-LTO Up 18.5/30 Tylan 12-FGA Up Tystar Up 25.43/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 400 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 23 06:50:08 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 23 May 2005 06:50:08 -0700 Subject: Diffusion Morning Report 05/23/05 Message-ID: <4291DF90.7020803@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride had some problems over the weekend-looked fine this morning leak rate looks fine back in pump program.. Ebeam cryo 1 is warm this morning-checking it out. Tylan 2 still has source controller issues-checking it out. Everything else looks OK for now. Date: 5/23/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow source controller issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up .37/30 Tylan 10-Nitride yellow Particles look good 12.65/30 Tylan 11-BPSG-LTO Up 22.3/30 Tylan 12-FGA Up Tystar Up 25.77/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 360 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 24 07:42:31 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 24 May 2005 07:42:31 -0700 Subject: Diffusion Morning Report 05/24/05 Message-ID: <42933D57.6030206@snf.stanford.edu> Good Morning All, Well lets just say we have had better mornings. Possible problems with Nitride. Tylan 1 has no communication to the MFS 460 or the TCU. Epi burn box is down -looking into it. SEMHitachi is having Vacuum problems. Nothing else down yet. Date: 5/24/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down Comm failure Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up .37/30 Tylan 10-Nitride yellow Particles look good 12.65/30 Tylan 11-BPSG-LTO Up 22.53/30 Tylan 12-FGA Up Tystar Up 26.15/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 360 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From onlineserv at chaterone.com Tue May 24 11:24:01 2005 From: onlineserv at chaterone.com (Charter One Bank) Date: Tue, 24 May 2005 18:24:01 +0000 Subject: Please Read This Carefully! Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 25 06:25:16 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 25 May 2005 06:25:16 -0700 Subject: Diffusion Morning Report 05/25/05 Message-ID: <42947CBC.5090004@snf.stanford.edu> Good Morning All, Looking ok this morning. SEMHITACHI is still down as is the burn box for Epi. Tylan 1 still has the comm issue-parts on the way. No other problems at this time. Date: 5/2/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down Comm failure Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up .37/30 Tylan 10-Nitride yellow Particles look good 12.65/30 Tylan 11-BPSG-LTO Up 22.53/30 Tylan 12-FGA Up Tystar Up 26.15/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 350 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 26 06:45:06 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 26 May 2005 06:45:06 -0700 Subject: Diffusion Morning Report 05/26/05 Message-ID: <4295D2E2.1020002@snf.stanford.edu> Good Morning All, Looking OK this morning. Epi burn box going back together. Tylan 1 is still down for comm problem. Ebeam is down for cryo problems- replacing relays for cold heads. Observing Nitride. > Date: 5/26/2005 THICKNESS-Change at > Tube Name/Number Status Comments > Tylan 1 Down Comm failure > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 Up > Tylan 8-SiGe Up 3.12/30 > Tylan 9-Poly Up 1.67/30 > Tylan 10-Nitride yellow Particles look good 13.05/30 > Tylan 11-BPSG-LTO Up 22.53/30 > Tylan 12-FGA Up > Tystar Up 26.55/30 > Doped Poly GONE > TEOS yellow > Tylan 16 N/A > Thermco 1 Up > Thermco 2 Up > Thermco Poly yellow testing doped > Thermco Nitride Down Waiting > > Burn Box Up > ZYGO up . > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces B on line 345 PSI changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From secure at bankofthewest.com Fri May 27 11:25:54 2005 From: secure at bankofthewest.com (West Banking Online) Date: Fri, 27 May 2005 13:25:54 -0500 Subject: Please Update Your Bank Of The West Online Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 31 06:48:22 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 31 May 2005 06:48:22 -0700 Subject: Diffusion Morning Report 05/31/05 Message-ID: <429C6B26.7090803@snf.stanford.edu> Good Morning All, Looking ok this morning. Epi has facilities problems-checking it out. Nitride is having intermittant gate valve issues-looking into it. Tylan 1 is still down. LTO is down for pull and clean. Everything else looks ok for now. Date: 5/26/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down Comm failure Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 3.12/30 Tylan 9-Poly Up 1.84/30 Tylan 10-Nitride yellow Particles look good 13.39/30 Tylan 11-BPSG-LTO Down pull and clean 29.12/30 Tylan 12-FGA Up Tystar Up 3.58/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing doped Thermco Nitride Down Waiting Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 280 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: