Diffusion Morning Report 05/03/05

Ted Berg tberg at snf.stanford.edu
Tue May 3 06:24:10 PDT 2005

Good  Morning All,
    Looking good this morning.  Still observing Nitride.  Zygo is having 
problems-looking into it.Tystar is getting close to pull and clean.
   Everything else is looking OK for now.

  	Date: 	5/3/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	yellow 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	3.12/30
Tylan 9-Poly 	Up 	  	1.17/30
Tylan 10-Nitride 	yellow 	Observing particles 	6.75/30
Tylan 11-BPSG-LTO 	Up 	  	10.26/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	23.91/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	Down 	Light Problems
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 445 PSI 	 changeover working well 

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