Diffusion Morning Report 05/04/05

Ted Berg tberg at snf.stanford.edu
Wed May 4 06:36:49 PDT 2005


Good Morning All,
    Looking OK this morning. Observing Nitride-leak checked 
yesterday-looked good.  Ebeam has high vacuum-regening.  Fighting with 
HCL for EPI.
Everything else looks OK for now.

  	Date: 	5/4/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	yellow 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	3.12/30
Tylan 9-Poly 	Up 	  	1.32/30
Tylan 10-Nitride 	yellow 	Observing particles 	6.75/30
Tylan 11-BPSG-LTO 	Up 	  	10.36/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	23.91/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	B on line 445 PSI 	 changeover working well 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20050504/0268e035/attachment.html>


More information about the diffusion mailing list