Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Fri May 6 08:37:04 PDT 2005


Morning All,
Ted is out today. The burnbox for LPCVD was cleaned and exhaust back
pressure at pumps checked, and they were good. everything else is
looking good this morning.



Diffusion                          Date:
5/6/2005
Tube Name/Number         Status
Comments                        THICKNESS-Change at
Tylan 1                            Up
Tylan 2                            Up
Tylan 3                            Up
Tylan 4                            Up
Tylan 5-BBr3                   Up
Tylan 6-POCl3                 Up
Tylan 7-TEOS2                down                                   Qual
testing
Tylan 8-SiGe
Up
3.12/30
Tylan 9-Poly
Up
1.86/30
Tylan 10-Nitride               Up
Observing particles        6.75/30
Tylan 11-BPSG-LTO
Up
10.77/30
Tylan 12-FGA                  Up
Tystar
Up
24.08
Doped Poly                     GONE
TEOS Up
Tylan 16                         N/A
Thermco 1                      UP
Thermco 1 UP
Thermco Poly                Yellow
testing doped
Thermco Nitride
Down Waiting

Burn Box
Up                                         Cleaned this morning

ZYGO                           Up

GAAS 22                      UP
GAAS 23                      UP

SiH4 for furnaces                                       Auto changeover
working well  B on line 445 PSI



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