Diffusion Morning Report 05/10/05

Ted Berg tberg at snf.stanford.edu
Tue May 10 06:35:45 PDT 2005


Good Morning All,
    Looking good this morning. Ebeam is ok this morning. Nitride under 
observation. Tystar getting close to pull and clean. Everything else
looks OK for now.

  	Date: 	5/10/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	yellow 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	3.12/30
Tylan 9-Poly 	Up 	  	1.86/30
Tylan 10-Nitride 	yellow 	Observing particles 	9.35/30
Tylan 11-BPSG-LTO 	Up 	  	15.86/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	24.78/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	B on line 415 PSI 	 changeover working well 


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