Diffusion Morning Report 05/16/05

Ted Berg tberg at snf.stanford.edu
Mon May 16 06:40:19 PDT 2005


Good Morning All,
    Looking OK this morning.  Nitride still under observation.  Ebeam is 
down for a bad PG2. SiGe  had N2/Ar leak alarm-zero drift-looking into it.
Everything else looks OK for now.

  	Date: 	5/16/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	yellow 	Qual testing 	 
Tylan 8-SiGe 	yellow 	N2/Ar zero drift
	3.12/30
Tylan 9-Poly 	Up 	  	6.34/30
Tylan 10-Nitride 	yellow 	Observing particles 	10.7/30
Tylan 11-BPSG-LTO 	Up 	  	16.09/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	24.78/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	B on line 400 PSI 	 changeover working well 


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