Diffusion Morning Report 05/23/05

Ted Berg tberg at snf.stanford.edu
Mon May 23 06:50:08 PDT 2005

Good Morning All,
    Looking pretty good this morning. Nitride had some problems over the 
weekend-looked fine this morning  leak rate looks fine back in pump 
Ebeam cryo 1 is warm this morning-checking it out.  Tylan 2 still has 
source controller issues-checking it out. Everything else looks OK for now.

  	Date: 	5/23/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	yellow 	source controller issues 	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	3.12/30
Tylan 9-Poly 	Up 	  	.37/30
Tylan 10-Nitride 	yellow 	Particles look good 	12.65/30
Tylan 11-BPSG-LTO 	Up 	  	22.3/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	25.77/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 360 PSI 	 changeover working well 

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