Diffusion Morning Report 05/24/05

Ted Berg tberg at snf.stanford.edu
Tue May 24 07:42:31 PDT 2005

Good Morning All,
    Well lets just say we have had better mornings. Possible problems 
with Nitride. Tylan 1 has no communication to the MFS 460 or the TCU.
Epi burn box is down -looking into it.  SEMHitachi is having Vacuum 
problems. Nothing else down yet.

  	Date: 	5/24/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Down 	Comm failure 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	3.12/30
Tylan 9-Poly 	Up 	  	.37/30
Tylan 10-Nitride 	yellow 	Particles look good 	12.65/30
Tylan 11-BPSG-LTO 	Up 	  	22.53/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	26.15/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 360 PSI 	 changeover working well 

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