Diffusion morning report 11/02/05

Ted Berg tberg at snf.stanford.edu
Wed Nov 2 06:40:38 PST 2005


Good  Morning  All,
    Looking good this morning. Burn box pressure was high cleaning this 
morning. Everything else looks OK for now.

  	Date: 	11/1/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	8.72/30
Tylan 9-Poly 	Up 	  	24.96/30
Tylan 10-Nitride 	Up 	  	5.39/30 
Tylan 11-BPSG-LTO 	Up 	  	8.377/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	B on line 420 	 changeover working well 


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