Diffusion Morning Report 11/07/05

Ted Berg tberg at snf.stanford.edu
Mon Nov 7 06:37:24 PST 2005


Good Morning All,
    Looking good this morning.  Continuing Thermco 2 hookup and debug. 
Epi has several spots on Suceptor-will discuss with Maurice.  GeH4 will
be back on for Epi and SiGe this morning.  Everything else looks OK for now.

  	Date: 	11/7/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	8.72/30
Tylan 9-Poly 	Up 	  	26.26/30
Tylan 10-Nitride 	Up 	  	5.5.43/30 
Tylan 11-BPSG-LTO 	Up 	  	8.89/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	B on line 420 	 changeover working well 


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