Diffusion Morning Report 11/09/05

Ted Berg tberg at snf.stanford.edu
Wed Nov 9 07:11:12 PST 2005

Good Morning All,
    Looking good this morning.  Epi suceptor changed yesterday. HCl 
cylinder changed this morning for Epi. Thermco 1 had problems reaching temp-
looking into it.  Semhitachi has High Voltage issues.

  	Date: 	11/9/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	8.72/30
Tylan 9-Poly 	Up 	  	27.33/30
Tylan 10-Nitride 	Up 	  	5.54/30 
Tylan 11-BPSG-LTO 	Up 	  	9.45/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	yellow 	problem with front zone temp 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 400 	 changeover working well 

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