Diffusion Morning Report 11/16/05

Ted Berg tberg at snf.stanford.edu
Wed Nov 16 07:09:40 PST 2005

Good Morning All,
     Looking fair this morning. Epi has a water leak and a vacuum leak 
and a dirty tube-checking it out. Nitride looks like it may have a bad pump-
investigating. Poly is getting close to pull and clean-probably early 
next week.   SiGe in leak test for Germane.Everything else looks OK for now.

  	Date: 	11/16/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	yellow
	germane in leak test
Tylan 9-Poly 	Up 	  	27.86/30
Tylan 10-Nitride 	Up 	  	5.74/30 
Tylan 11-BPSG-LTO 	Up 	  	11.22/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	yellow 	problem with front zone temp 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 390 	 changeover working well 

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