Diffusion Morning Report 11/18/05

Ted Berg tberg at snf.stanford.edu
Fri Nov 18 06:32:16 PST 2005

Good Morning all,
    Looking good this morning. Burn box being cleaned this morning. Epi 
should be back up. SiGe GeH4 leak test.  Everything else looks OK for now.
Poly going down on Monday for pull and clean.

  	Date: 	11/18/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	GeH4 leak check 	10.42/30
Tylan 9-Poly 	Up 	  	28.51/30
Tylan 10-Nitride 	Up 	  	7.0/30 
Tylan 11-BPSG-LTO 	Up 	  	11.95/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	yellow 	problem with front zone temp 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 380 	 changeover working well 

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