Diffusion Morning Report 11/18/05
tberg at snf.stanford.edu
Fri Nov 18 06:32:16 PST 2005
Good Morning all,
Looking good this morning. Burn box being cleaned this morning. Epi
should be back up. SiGe GeH4 leak test. Everything else looks OK for now.
Poly going down on Monday for pull and clean.
Date: 11/18/2005 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 Up
Tylan 8-SiGe Up GeH4 leak check 10.42/30
Tylan 9-Poly Up 28.51/30
Tylan 10-Nitride Up 7.0/30
Tylan 11-BPSG-LTO Up 11.95/30
Tylan 12-FGA Up
Thermco 1 yellow problem with front zone temp
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Burn Box Up
ZYGO up .
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces B on line 380 changeover working well
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