Diffusion Morning Report 11/21/05

Ted Berg tberg at snf.stanford.edu
Mon Nov 21 06:29:42 PST 2005

Good Morning All,
    Looking good this morning.  Poly is down for scheduled pull and 
clean.  Epi is back up after tube change .SiGe is being checked  out after
cylinder change.   Thermco 2 pump lines being installed. Everything else 
looks OK for now.

  	Date: 	11/21/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	GeH4 leak check 	10.42/30
Tylan 9-Poly 	Down 	pull and clean 	0/30
Tylan 10-Nitride 	Up 	  	7.4/30 
Tylan 11-BPSG-LTO 	Up 	  	12.66/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	yellow 	problem with front zone temp 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 360 	 changeover working well 

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