diffusion morning Report 11/22/05

Ted Berg tberg at snf.stanford.edu
Tue Nov 22 06:24:07 PST 2005

Good morning All,
    Looking good this morning. SiGe leak looks OK so it will be back up. 
Poly is testing after pull and clean. Thermco 2 moving ahead.
Everything else looks OK for now.

  	Date: 	11/22/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	GeH4 leak check OK 	10.42/30
Tylan 9-Poly 	Down 	testing 	0/30
Tylan 10-Nitride 	Up 	  	9.03/30 
Tylan 11-BPSG-LTO 	Up 	  	18.76/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	yellow 	problem with front zone temp 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 340 	 changeover working well 

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