diffusion morning Report 11/22/05
tberg at snf.stanford.edu
Tue Nov 22 06:24:07 PST 2005
Good morning All,
Looking good this morning. SiGe leak looks OK so it will be back up.
Poly is testing after pull and clean. Thermco 2 moving ahead.
Everything else looks OK for now.
Date: 11/22/2005 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 Up
Tylan 8-SiGe Up GeH4 leak check OK 10.42/30
Tylan 9-Poly Down testing 0/30
Tylan 10-Nitride Up 9.03/30
Tylan 11-BPSG-LTO Up 18.76/30
Tylan 12-FGA Up
Thermco 1 yellow problem with front zone temp
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Burn Box Up
ZYGO up .
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces B on line 340 changeover working well
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