Diffusion Morning Report 11/23/05

Ted Berg tberg at snf.stanford.edu
Wed Nov 23 07:10:28 PST 2005

Good Morning All,
    Looking pretty good this morning. Epi had a burn box issue-resolved, 
changed HCL cylinder. Preemptive burn box clean this morning.
Everything else looks OK for now.

  	Date: 	11/23/2005 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	10.42/30
Tylan 9-Poly 	Up 	  	1.38/30
Tylan 10-Nitride 	Up 	  	9.52/30 
Tylan 11-BPSG-LTO 	Up 	  	20.25/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	yellow 	problem with front zone temp 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	.
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	B on line 330 	 changeover working well 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20051123/0b18915e/attachment.html>

More information about the diffusion mailing list