From tberg at snf.stanford.edu Mon Oct 3 06:30:28 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 03 Oct 2005 06:30:28 -0700 Subject: Diffusion Morning Report 10/03/05 Message-ID: <43413274.9090205@snf.stanford.edu> Good Morning All, Looking good this Morning. SiGe had some problems venting-looking into it. Everything else is looking OK for now. Date: 10/3/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Down Won't vent 4.67/30 Tylan 9-Poly Up .87/30 Tylan 10-Nitride Up 23.25/30 Tylan 11-BPSG-LTO Up 18.83/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 620 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 4 07:25:29 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 04 Oct 2005 07:25:29 -0700 Subject: Morning Report 10/04/05 Message-ID: <434290D9.5010201@snf.stanford.edu> Good Morning All, Looking Good this morning. Possible temp issues with Tylan2-looking into it. Thermco Nitride testing. Thermco bank 2 coming along. Everything else looks OK for now. Date: 10/4/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow Possible temp problems Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 5.52/30 Tylan 9-Poly Up .87/30 Tylan 10-Nitride Up 23.25/30 Tylan 11-BPSG-LTO Up 19.08/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 620 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 5 06:38:23 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 05 Oct 2005 06:38:23 -0700 Subject: Diffusion Morning Report 10/05/05 Message-ID: <4343D74F.3040708@snf.stanford.edu> Good Morning All, Looking Good this morning. Epi has a possible temp problem-looking into it. FGA2 is almost ready. Thermco 2 is moving along well. Torch was changed on Tylan 2 yesterday need test. Everything else looks OK for now. Date: 10/5/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow torch changed Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 5.52/30 Tylan 9-Poly Up .87/30 Tylan 10-Nitride Up 23.43/30 Tylan 11-BPSG-LTO Up 19.08/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 600 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 6 06:34:48 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 06 Oct 2005 06:34:48 -0700 Subject: Diffusion Morning Report 10/06/05 Message-ID: <434527F8.4080401@snf.stanford.edu> Good Morning All, Looking OK this morning. Epi is down it keeps kicking off-looking into it. Ebeam is down-program issue- looking into it. FGA2 is at temp and should be almost ready to go. Everything else is OK for now. Date: 10/6/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow torch changed Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 5.52/30 Tylan 9-Poly Up .87/30 Tylan 10-Nitride Up 23.63/30 Tylan 11-BPSG-LTO Up 20.94/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 600 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 7 06:53:56 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 07 Oct 2005 06:53:56 -0700 Subject: Diffusion Morning Report 10/07/05 Message-ID: <43467DF4.7070206@snf.stanford.edu> Good Morning All, Epi is the problem child De Jour. It is intermittently kicking off- looking at Power supplies, etc. Burn box cleaned this morning. FGA2 very close. Thermco 2 moving along. Everything else is OK for now. Date: 10/7/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow torch changed Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 5.76/30 Tylan 9-Poly Up .87/30 Tylan 10-Nitride Up 24.38/30 Tylan 11-BPSG-LTO Up 20.94/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 600 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 10 06:29:06 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 10 Oct 2005 06:29:06 -0700 Subject: Diffusion Morning Report 10/10/05 Message-ID: <434A6CA2.6080303@snf.stanford.edu> Good Morning all, Looking pretty good this morning. GeH4 for SiGe needs to be changed. Epi is having problems with dopant flows. Ebeam had some errors during writes but is OK now. Everything else looks OK for now. Date: 10/10/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow torch changed Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up Needs GeH4 cylinder change 6.78/30 Tylan 9-Poly Up 3.32/30 Tylan 10-Nitride Up 24.38/30 Tylan 11-BPSG-LTO Up 21.44/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 590 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 11 05:36:39 2005 From: nanotech at nsti.org (NSTI) Date: Tue, 11 Oct 2005 05:36:39 -0700 Subject: Nano Impact Summit DC - Discounted Registration Deadline Today Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 11 06:27:23 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 11 Oct 2005 06:27:23 -0700 Subject: Diffusion Morning Report 10/11/05 Message-ID: <434BBDBB.7070304@snf.stanford.edu> Good Morning All, Looking good this morning. Tylan 2 had a TC problem -corrected. Epi seems to be behaving. FGA2 is ready. Thermcos are coming along. Everything else is OK for now. Date: 10/11/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow torch changed Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up GeH4 cylinder changed 6.78/30 Tylan 9-Poly Up 3.48/30 Tylan 10-Nitride Up 24.48/30 Tylan 11-BPSG-LTO Up 22.09/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 590 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 12 06:32:44 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 12 Oct 2005 06:32:44 -0700 Subject: Diffusion Morning Report 10/12/05 Message-ID: <434D107C.8010702@snf.stanford.edu> Good Morning All, Looking good this morning. Ebeam had program issues ok now. Thermco bank 2 coming along. Everything else OK for now. Date: 10/11/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow torch changed Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 6.78/30 Tylan 9-Poly Up 3.83/30 Tylan 10-Nitride Up 24.48/30 Tylan 11-BPSG-LTO Up 22.39/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 580 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 13 07:33:46 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 13 Oct 2005 07:33:46 -0700 Subject: Diffusion Morning Report 10/13/05 Message-ID: <434E704A.7000901@snf.stanford.edu> Good Morning All, Looking Good this morning . Nitride and LTO are getting close to clean. Thermco 2 is coming along well. Everything else is OK for now. Date: 10/13/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 6.78/30 Tylan 9-Poly Up 4.16/30 Tylan 10-Nitride Up 24.82/30 Tylan 11-BPSG-LTO Up 22.94/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 580 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 14 06:27:12 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 14 Oct 2005 06:27:12 -0700 Subject: Diffusion Morning Report 10/14/05 Message-ID: <434FB230.5000002@snf.stanford.edu> Good Morning All, Looking good this morning. Burn box cleaned this morning. Thermco 2 is moving ahead. Everything else looks OK for now. Date: 10/14/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 6.78/30 Tylan 9-Poly Up 4.16/30 Tylan 10-Nitride Up 24.82/30 Tylan 11-BPSG-LTO Up 23.084/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 580 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Oct 14 08:31:35 2005 From: nanotech at nsti.org (Nano World News) Date: Fri, 14 Oct 2005 08:31:35 -0700 Subject: Nano World News October 2005 Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 17 06:41:58 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 17 Oct 2005 06:41:58 -0700 Subject: Diffusion Morning Report 10/17/05 Message-ID: <4353AA26.20601@snf.stanford.edu> Good Morning All, Looking good this morning. Epi had temp contol issues -checking it out. Poly pressure unstable-looking into it. Everything else looks OK for now. Date: 10/17/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.26/30 Tylan 9-Poly Yellow Pressure unstable 4.16/30 Tylan 10-Nitride Up 24.82/30 Tylan 11-BPSG-LTO Up 25.28/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 580 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 18 07:09:53 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 18 Oct 2005 07:09:53 -0700 Subject: Diffusion Morning Report 10/18/05 Message-ID: <43550231.30402@snf.stanford.edu> Good Morning All, Looking good this morning. Did a TC cal on epi-got rid of offset. Looking into poly pressure fluctuations- manual mode only saw about 20mT fluctuations still looking. FGA2 has a nice operating procedure-Thanks Nancy and should be ready to run. Everything else looks OK for now. Date: 10/18/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.26/30 Tylan 9-Poly yellow pressure unstable 4.16/30 Tylan 10-Nitride Up 24.82/30 Tylan 11-BPSG-LTO Up 25.28/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 580 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 19 07:00:43 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 19 Oct 2005 07:00:43 -0700 Subject: Diffusion Morning Report 10/19/05 Message-ID: <4356518B.7090808@snf.stanford.edu> Good Morning All, Looking good this morning. NH3 reg replaced and leak checked-nitride needs test. Adjusted PID values for pressure on Poly control is more stable now. Did TC cal on Epi. Everything else looks OK for now. Date: 10/18/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.26/30 Tylan 9-Poly yellow pressure unstable 4.46/30 Tylan 10-Nitride Up Needs test after NH3 reg Change 26.78/30 Tylan 11-BPSG-LTO Up 26.6/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 580 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 20 06:50:18 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 20 Oct 2005 06:50:18 -0700 Subject: Diffusion Morning Report 10/20/05 Message-ID: <4357A09A.8010101@snf.stanford.edu> Good Morning All, Looking good this morning. LTO had a recipe-pump problem-checking it out. NH3 flow is fine after reg change. Everything else looks OK for now. Date: 10/20/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.26/30 Tylan 9-Poly Up 8.79/30 Tylan 10-Nitride Up 26.85/30 Tylan 11-BPSG-LTO Up Possible leak 26.6/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 580 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 21 07:11:48 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 21 Oct 2005 07:11:48 -0700 Subject: Diffusion Morning Report 10/21/05 Message-ID: <4358F724.9070908@snf.stanford.edu> Good Morning All, Looking ok this morning. LTO down for pull and clean. Burn box cleaned this morning. Ebeam Regen on Monday. Nitride going down next week for pull and clean. Date: 10/21/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.26/30 Tylan 9-Poly Up 9.25/30 Tylan 10-Nitride Up 27.5/30 Tylan 11-BPSG-LTO Down Pull and Clean 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 520 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 24 06:42:20 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 24 Oct 2005 06:42:20 -0700 Subject: Diffusion Morning Report 10/24/05 Message-ID: <435CE4BC.3090708@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride is down for pull and clean-will also look into program problems. Ebeam is down for scheduled regen Epi has pump/vent issues-looking into it. Everything else looks OK for now. Date: 10/24/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.72/30 Tylan 9-Poly Up 11.89/30 Tylan 10-Nitride Down Pull and clean 0/30 Tylan 11-BPSG-LTO Up 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 500 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 25 06:23:45 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 25 Oct 2005 06:23:45 -0700 Subject: Diffusion Morning Report 10/25/05 Message-ID: <435E31E1.70501@snf.stanford.edu> Good Morning All , Looking good this morning. Epi is back up, Nitride is coated after Pull and clean and should be back up. Burn chamber on Tylan 2 replaced. Everything else looks OK for Now. Date: 10/25/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.72/30 Tylan 9-Poly Up 12.05/30 Tylan 10-Nitride yellow needs test after p&c 0/30 Tylan 11-BPSG-LTO Up 4.03/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 490 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 25 08:02:04 2005 From: nanotech at nsti.org (Nanotech 2006) Date: Tue, 25 Oct 2005 08:02:04 -0700 Subject: NSTI-Nanotech 2006 - 2nd Announcement and Call for Papers Message-ID: Nanotech 2006 May 7-11, Boston, Massachusetts http://www.nsti.org/Nanotech2006 The 9th annual NSTI Nanotech 2006, the premier nanotechnology conference and trade show in the U.S., will take place May 7-11, 2006 at the Hynes Convention Center, Boston, Massachusetts. The largest and most comprehensive nanotechnology event in the U.S., Nanotech 2006 will host over 3,000 attendees, 300 exhibitors, 600 business & research presentations, and 100+ Nanotech Ventures. Over 100 early stage nanotech companies will be presenting within the Nanotech 2006 Early Stage Company and Investment Review. The Nanotech 2006 Scientific Program is the most respected nano event in the U.S., with endorsements from top U.S. and European societies, research agencies and fortune 500 companies. This year?s program is schedule with special industry focused symposia. These include sessions on the Health Care, Biotechnology, Materials, Surface sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. Workshops and Ventures events this year include: Nano Industrial Impact Workshop ? Sunday May 7 One-Day Intensive Program to educate participants in the current state of the art in a range of nanotechnologies and impacted industries. All courses are presented by leading experts in their respective fields. Nanotech Ventures Emerging Company Review ? May 8 - 10 Join the Nanotech Ventures community in participating in the world's largest nanotechnology venture forum. 50 Early Stage Companies Presenting in most every high-tech industrial sector. Clean & Controlled Environments ? May 8 - 10 Industry leading event for cleanrooms, contamination management and controlled environments for small particles. Conference and Symposia this year include: Nanoscale Electronics & Microsystems ? Nano Electronics & Photonics ? Nano Fabrication ? MEMS & NEMS ? Sensors & Systems ? Micro & Nano Fluidics ? MSM - Modeling Microsystems ? WCM - Compact Modeling Nanoscale Materials & Technologies ? Nanostructured Materials & Devices ? Soft Nanotechnologies & Applications ? Polymer Nanotechnology ? Carbon Nano Structures & Devices ? Nano Particles & Applications ? Composites & Interfaces ? Energy Technologies & Applications ? Environment & Society ? ICCN - Nanoscale Modeling ? Nanoscale Characterization Nanotech in Life Science & Medicine ? Bio Nano Materials & Tissue Engineering ? Bio Sensors & Diagnostics ? Biomarkers & Nanoparticles ? Cancer Diagnostics, Imaging & Treatment ? Cellular & Molecular Dynamics ? Computational & Modeling - ICCN ? Drug Delivery & Therapeutics ? Imaging ? Nano Medicine ? Nanotech to Neurology Clean & Controlled Environments ? Clean & Controlled Environments Business, Partnering, Policy ? Investment, Licensing, Partnering ? Initiatives, Education & Policy Nanotech 2006 May 7-11, Boston, Massachusetts http://www.nsti.org/Nanotech2006 --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6199311S at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 26 06:53:17 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 26 Oct 2005 06:53:17 -0700 Subject: Diffusion Morning Report 10/26/05 Message-ID: <435F8A4D.6010205@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride is back up after pull and clean. HCL for epi being changed over this morning. Thermco 2 bank coming along. Everything else looks OK for Now. Date: 10/26/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.72/30 Tylan 9-Poly Up 12.05/30 Tylan 10-Nitride Up 0/30 Tylan 11-BPSG-LTO Up 4.49/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 480 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 27 07:21:52 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 27 Oct 2005 07:21:52 -0700 Subject: Diffusion mornong report 10/27/05 Message-ID: <4360E280.2000700@snf.stanford.edu> Good MOrning All, Looking good this morning. LPs are all back up after pulls. Poly went up 6 microns yesterday are we allowing 4 micron runs? Everything else looks OK for now. Thermco 2 coming along fine. Date: 10/27/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.72/30 Tylan 9-Poly Up 18.32/30 Tylan 10-Nitride Up 1.0/30 Tylan 11-BPSG-LTO Up 6.0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 460 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Oct 28 07:34:58 2005 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Fri, 28 Oct 2005 07:34:58 -0700 Subject: Diffusion Morning Report Message-ID: Morning All, Ted is out today. There are no problems today in diffusion. The burnbox was cleaned this morning. All else is good. Date: 10/28/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.72/30 Tylan 9-Poly Up 23.08/30 Tylan 10-Nitride Up 2.39/30 Tylan 11-BPSG-LTO Up 6.2/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 450 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 31 07:45:50 2005 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 31 Oct 2005 07:45:50 -0800 Subject: Diffusion Morning Report 10/31/05 Message-ID: <43663C2E.6020508@snf.stanford.edu> Good Morning All, Looking good this morning. Ebeam has some issues- looking into it. Diffusion looking good Poly is going up really fast. everything else looks ok for now. Date: 10/31/2005 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 8.72/30 Tylan 9-Poly Up 23.76/30 Tylan 10-Nitride Up 2.6/30 Tylan 11-BPSG-LTO Up 7.87/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up . GAAS 22 UP GAAS 23 UP SiH4 for furnaces B on line 420 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: